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1500℃ single heating zone low vacuum CVD system with 3-channel float flowmeter to supply gas CY-O1500-60IT-3F-LV

1500℃ single heating zone low vacuum CVD system with 3-channel float flowmeter to supply gas CY-O1500-60IT-3F-LV

    1500℃ single heating zone low vacuum CVD system is equipped with a three-channel float flowmeter, which can mix 1~3 channels of gas to accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.

1500℃ single heating zone low vacuum CVD system consists of a 1500℃ single temperature zone tube furnace, a three-channel float flowmeter and a double stage rotary vane vacuum pump. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment lifting temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

The furnace tube is made of high-purity alumina, and the furnace body adopts integrated design. The unique design can ensure the system is stable and safe at 1500℃. The heating element is made of high-quality silicon carbon rod, which can reach 1500℃ high temperature. If the customer has the need, the silicon molybdenum rod heating element can be customized to achieve a higher temperature of 1700℃.

1500℃ single heating zone low vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1500℃ single heating zone low vacuum CVD system technical parameters:

Vacuum tube   furnace



Tube material

High purity alumina

Tube diameter


Tube length


Furnace chamber   length


Heating zone   length


Constant   temperature zone


Operating   temperature


Temperature  control accuracy


Temperature   control mode

30 or 50 segment program temperature control

Display mode


Sealing   method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint



Power supply

AC:220V   50/60Hz

Gas supply   system



Gas channel


Measuring   unit

Gas float   flowmeter

Measuring range

A channel: 0100ml H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 16~160ml  N2 gas

C channel: 25250ml  Ar gas

measurement   accuracy


Pipe   pressure resistance


Working   pressure difference


Connecting   pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface   specification

1/4" ferrule connector for gas inlet and outlet

Exhaust   system

Mechanical   pump

Rotary vane pump

Pumping rate


Exhaust   interface


Vacuum   measurement

Resistance gauge

Ultimate   vacuum


Power supply

AC:220V   50/60Hz

Pumping   interface


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