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Touch Screen Compact Three Rotary Target Plasma Sputtering Evaporator Coater Touch Screen Compact Three Rotary Target Plasma Sputtering Evaporator Coater Touch Screen Compact Three Rotary Target Plasma Sputtering Evaporator Coater

Touch Screen Compact Three Rotary Target Plasma Sputtering Evaporator Coater

Basic Info


  • Model NO.: CY-VTC-16-SM

  • Customized: Customized

  • Structure: Desktop

  • Type: Evaporation Coater

  • Control Panel: Touch Screen

  • Vacuum Chamber: High Purity Quartz

  • Trademark: CY

  • Specification: 150 mm ID x 150 mm H

  • HS Code: 85141090

  • Application: Industry, School, Lab

  • Certification: CE, TUV

  • Material: Alloy

  • Sealing Flange: Stainless Steel

  • Target: Customized

  • Warranty: 12 Months

  • Transport Package: Wooden Box

  • Origin: Zhengzhou, China


Product Description


3 Rotary Target Plasma Sputtering Coater w. Substrate Heater (500°C) Including 3 Targets - VTC-16-3HD-LD
Introduction 

VTC-16-3HD-LD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use. 
Specification

Input PowerSingle phase 220 VAC, 50 / 60Hz
700 W (including vacuum pump)
For using 110V AC, we will include a transformer for you. Please select the voltage in the Product Options
Output Power1600 VDC
40 mA max
Vacuum ChamberVacuum chamber: 150 mm ID x 150 mm H, made of high purity quartz
Sealing flange made of stainless steel with flat O-ring
Sample Stage with HeaterStage size: 50 mm Dia.
Sputtering distance range: 25 - 40 mm adjustable
Rotatable stage with three sputtering positions (controlled by the touch screen)
Substrate heater is built-in with a maximum heating temperature of 500 °C
PID temperature controller with +/- 1 °C accuracy is integrated to the touch screen
Control Panel
 
6" color touch screen with PLC integration for easy operation
Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to the touch screen panel
Adjustment knobs on the front panel for gas intake and sputtering current control
Sputtering position, sputtering timer, and process logging are accessible from the touch screen
ShieldStainless steel shield cage is included for extra protection
Sputtering Targets
 
Target size requirements: 47 mm Dia. x 2.5 mm max
Three targets are included in standard package for immediate use:
Au target, 47 mm Dia. x 0.12 mm
Ag target, 47 mm Dia. x 0.5 mm
Cu target, 47 mm Dia. x 2.5 mm
Vacuum Pump
(Optional)


 
Built-in KF25 vacuum port for connecting to a vacuum pump
Vacuum pump with KF25 connector is required, but not included. User may choose
A double stage mechanical vacuum pump for vacuum up to 10^-2 Torr
Or a turbo pump for vacuum up to 10^-4 Torr
Vacuum pump can be plugged in the power outlet on the left of coater for automatic control
Dimensions440 mm L × 330 mm W × 455 mm H
Net Weight50 kg

Touch Screen Compact Three Rotary Target Plasma Sputtering Evaporator CoaterTouch Screen Compact Three Rotary Target Plasma Sputtering Evaporator CoaterTouch Screen Compact Three Rotary Target Plasma Sputtering Evaporator CoaterTouch Screen Compact Three Rotary Target Plasma Sputtering Evaporator CoaterTouch Screen Compact Three Rotary Target Plasma Sputtering Evaporator Coater
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us. 

Touch Screen Compact Three Rotary Target Plasma Sputtering Evaporator Coater



Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Korea Distributor:
    NEO LFN Corp
    Email:info@neolfn.com
    Tel:+82-31-999-4944
    Contact:Haeseop Kim
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