VTC-16-3HD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500℃. It can coat 1- 3 types of metallic materials to sample with the diameter up to 50 mm.
AC220, 50Hz 700W
Φ150*150mm made by purity quartz
Stainless steel flange with O-ring
·Stage size: 50 mm Dia.
·Substrate heater is built-in with a maximum heating temperature of 500℃
7”color touch screen with PLC integration for easy operation
Target size requirements: 47 mm Dia. x 2.5 mm max
A double stage mechanical vacuum pump for vacuum up to 1.0E-2 Torr
440 mm L × 330 mm W × 455 mm H