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3 Rotary Target Plasma Sputtering Coater with Substrate Heater (500 ℃) Including 3 Targets VTC-16-3HD 3 Rotary Target Plasma Sputtering Coater with Substrate Heater (500 ℃) Including 3 Targets VTC-16-3HD 3 Rotary Target Plasma Sputtering Coater with Substrate Heater (500 ℃) Including 3 Targets VTC-16-3HD

3 Rotary Target Plasma Sputtering Coater with Substrate Heater (500 ℃) Including 3 Targets VTC-16-3HD

VTC-16-3HD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500℃. It can coat 1- 3 types of metallic materials to sample with the diameter up to 50 mm.


Model No.

VTC-16-3HD

Input Power

AC220, 50Hz 700W

Output power

1600VDC,40mA max

Vacuum Chamber

Φ150*150mm made by purity quartz

Vacuum sealing

Stainless steel flange with O-ring

Sample stage

·Stage size: 50 mm Dia.
·Sputtering distance range: 25~40 mm adjustable
·Rotatable stage with three sputtering positions (controlled by the touch screen) 

·Substrate heater is built-in with a maximum heating temperature of 500℃
·PID temperature controller with +/- 1℃ accuracy is integrated into the touch screen

Control Panel

7”color touch screen with PLC integration for easy operation

Sputtering Targets

Target size requirements: 47 mm Dia. x 2.5 mm max

Vacuum Pump

A double stage mechanical vacuum pump for vacuum up to 1.0E-2 Torr

Dimensions

440 mm L × 330 mm W × 455 mm H

Gross weight

50kg

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