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Compact vacuum spin coater with oiless vacuum pump CY-EZ4

Compact vacuum spin coater with oiless vacuum pump CY-EZ4

    CY-EZ4 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4" diameter.The spinning speed is variable from 100-10000rpm with two programmable segments

Features

1.75w brushless dc motor,single chip microcomputer control

2.High-definition display

3.Pre-set single or multi-step coating operate

4.Prevent glue blocking design

5.PP anti- corrosion chamber, replaceable

6.HDPE vacuum adhesive disc 


Model No.

EZ4

Chamber dimension

Φ200mm

Maximum sample

10mm-100mm

Speed range

100~9999rpm adjustable

Accelerated speed

100~9999rpm/s

Speed resolution

1rpm

Speed accuracy

< ±5rpm

Control

5 sets programmable control,each sets with 5 steps

Motor power

Brushless DC Motor 75w

Working voltage

AC 110-220V, 50Hz

Outer dimension

250*210*200mm

Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Korea Distributor:
    NEO LFN Corp
    Email:info@neolfn.com
    Tel:+82-31-999-4944
    Contact:Haeseop Kim
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