Sputtering film targets can be roughly divided into mechanical and physical functional films according to their different functions and applications. The former includes abrasion, anti-friction, heat resistance, resistance to corrosion and other surface strengthening thin film materials, solid lubrication film materials, which includes the function such as electrical, magnetic, acoustic, optical thin film materials such as target material, concrete application in glass coating (all kinds of building glass, ITO transparent conductive glass, appliance glass, high reflection mirror and acrylic coating), arts and crafts decorative coating, high speed steel cutter coating, cutting Cutting tool coating, solar reflective material coating, photo electricity, semiconductor, optical magnetic storage media, passive components, graphic display, micro-electro-mechanical, optical components, and all kinds of mechanical wear and lubrication, biological medicine, all kinds of new functional coating (such as a hard film, metal film and semiconductor film, dielectric film, carbon film, ferromagnetic film and film, etc.)
Alloy film:
Using Cr, Cr-Cr N alloy target or inlaid target, reactive sputtering coating in N2, CH4 atmosphere, can be plated on various work piece Cr, Cr-C, Cr-N and other coatings. The micro hardness of pure Cr is 425 ~ 840HV and Cr-N is 1000 ~ 3500HV, which not only has high hardness and small friction coefficient, but can replace chromium electroplating in aqueous solution. Electroplating will cause hydrogen embrittlement, slow speed and environmental pollution.
Ultra-hard material film:
With Ti-N, Ti-C and other super hard coating coated tools, molds and other surfaces, friction coefficient is small, good chemical stability, with excellent heat resistance, wear resistance, oxidation resistance, impact resistance and other properties, not only can improve the working characteristics of tools, molds and so on, but also can improve the service life, generally can make the tool life increased 3 ~ 10 times.
Solar cell film:
Ti-N, Ti-C, Al2O3 and other films have stable chemical properties and good corrosion resistance in many media. They can be used as protective films of matrix materials. The amorphous alloy can be prepared by sputtering coating and liquid quenching method. The composition of amorphous alloy is almost the same, and there is no difference in corrosion and electrochemical properties, but the anodic current and oxidation rate of amorphous alloy obtained by sputtering method are slightly higher.
Solid lubricant film:
Mechanical parts that work under special conditions such as high temperature, low temperature, ultra-high vacuum and ray irradiation cannot use lubricating oil, but only solid lubricants such as soft metal or layered materials. Commonly used solid lubricants are soft metals (Au, Ag, Pb, Sn, etc.), layered substances (MoS2, WS2, graphite, CaF2, mica, etc.), polymer materials (nylon, PTFE, etc.) and so on. It is very effective to prepare MoS2 film and PTFE film by sputtering. Although MoS2 film can be prepared by chemical reaction coating, MoS2 film obtained by sputtering coating has good compactness and adhesion. The friction coefficient of MoS2 sputtering film is very low, in the range of 0.02 ~ 0.05. MoS2 has two problems in practical application: one is that some matrix materials such as Ag, Cu, Be cannot be coated at present; Second, with the increase of humidity, MoS2 film adhesion becomes worse. In the atmosphere to use to add Sb2O3 and other oxidants, in order to form a protective film on the surface of MoS2.
Polytetrafluoroethylene film can be prepared by sputtering. The experimental results show that the lubrication characteristics of the polymer film are not affected by environmental humidity, and it can be used in atmospheric environment for a long time. It is a promising solid lubricant. The upper limit of the service temperature is 5OoC, and the lubricity is lost only when the temperature is below -260oC.
MoS2, PTFE and other sputtering films is the ideal solid lubricant, which for a long time standby, sudden use and reliable equipment such as shock, alarm, fire, safety device. And its performance changes a little after a long time placing.
