Microwave Generator
◆10 kW SAIREM micro-wave generator (switch mode power supply)
◆2.45GHz Magnetron mirco-wave frequency
◆Circulator and isolator
◆Auto operated EH-tuning element
Plasma Source
◆6" plasma source ,excitation frequemcy 2.45GHz
◆Capable of operating in Low to High Power Density Plasma
◆Unique capabilities of temperature control at high power densities
◆Gas inlet into chamber from down side
◆Bias electrode
Substrate Holder
◆Exchangeable substrate holder with:
◆cooling element (appox D75mm)
◆Exchangeable holder plate for easy cleaning and maintenance
◆Molybdenum plasma contacting parts
◆Automatic height adjustment during growth
Charmber
◆Clamshell lid for easy-access substrate placement and cleaning
◆Water cooled Aulumium alloy structure
Gas Management System
◆5 gas lines including 5 mass flow controllers (addition on request)
◆MFC system
◆Pressure controller range: 100-300mbar
Vacumm
◆Turbo molecular pump+dry primary pump
CVD Controller
◆Computer controller recipe driven operation
◆Remote control, Detection,system upgrade
◆Substrate Camera (Optional)
◆ Pyrometer range: 400-1700°C
Growth Data
holder size of seeds (mm) | Number of seeds | Growth Days | Growth Height (mm) | Rough diamond weight(carat) | Total rough diamonds per cycle
(carat) | Total rough diamonds per month
(carat) | Diamond color before hpht | Diamond clarity before hpht |
75mm | 52 | 14 | 5 | 4.9 | 254.8 | 509.6 | D/E/F/G | VS2+ |
75mm | 40 | 5 | 6.4 | 256.0 | 512.0 | D/E/F/G | VS2+ |
75mm | 32 | 5 | 7.1 | 259.2 | 518.4 | D/E/F/G | VS2+ |
75mm | 26 | 5 | 10 | 260.0 | 520.0 | D/E/F/G | VS2+ |
