The universal vacuum post is intended for carrying out physical experiments at reduced pressure up to high vacuum - 5·10-7 mm. rt. Art. This vacuum post is excellent for physical deposition (PVD), chemical deposition (CVD), plasma chemical deposition (PECVD), thermal spraying, electron beam sputtering and many others. Also, the UVP-250 vacuum post can be adapted for research in the field of solid state physics when installing the appropriate equipment.The process of pumping and raising/lowering the vacuum chamber is controlled both in manual and automatic modes. The pressure and status of the vacuum post is displayed on the LCD display.
The vacuum chamber is made in the form of a cap. Chamber material - stainless steel 12X18H10T (AISI321). Rectangular cooling channels are welded on the chamber. The chamber flange has a lot of branch pipes for connecting various inputs: rotation, electrical, cryogenic. The vacuum post is equipped with an automated chamber lifting mechanism.
universal vacuum |
Inner diameter vacuum chamber | not less than, 250 mm |
Height vacuum chamber | not less than, 400 mm |
Camera type | Cylindrical bell-type |
Chamber materia | Stainless steel, 12X18H10T |
Processing the inner surface of the chamber | Grinding, polishing |
Pumping speed foreline pump | not less than,5 m3/h |
Foreline pump type | Dry scroll |
High vacuum pump type | Turbomolecular |
Pumping speed high vacuum pump | not less than, 300l/s |
Cooling system Serpentine | Fittings for inlet / outlet:1/4' |
Working vacuum | 1x10-6 mm Hg |
Ultimate vacuum | 5х10-7 mm. Hg |
Time to reach working vacuum | no more than, 60 min |
vacuum meter | type Combined wide range |
Pressure measurement range | 760 mm Hg |
Bypass pumping line | yes |
High vacuum valve Pneumatically operated | normally closed |
Connecting flanges | KF16 – 2 pcs. KF25 – 6 pcs. |
Vacuum system pressure and status indication | Indication of pressure and status of the vacuum system LCD screen on the control panel |
Dimensions | width x depth x height, mm 1000x1200x1800(2400) |
Weigh | no more 250KG |
Power supply | 220V |
Number of power phases | 1 |
Inlet air pressure | 4-8 Bar |
Power consumption | 0.5KW |
