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Silicon (Si) Sputtering Targets

Silicon (Si) Sputtering Targets

    Silicon (Si) Sputtering Targets


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Silicon (Si) Specifications

Material Type

Silicon

Symbol

Si

Atomic Weight

28.0855

Atomic Number

14

Color/Appearance

Dark Gray with a Bluish   Tinge, Semi-Metallic

Thermal Conductivity

150 W/m.K

Melting Point (°C)

1,410

Bulk Resistivity

>1 OHM-CM

Coefficient of Thermal   Expansion

2.6 x 10-6/K

Theoretical Density   (g/cc)

2.32

Dopant

Undoped

Z Ratio

0.712

Sputter

RF

Max Power Density

(Watts/Square Inch)

20*

Type of Bond

Indium, Elastomer

Comments

Alloys with W; use heavy   W boat. SiO produced.

 


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