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Tantalum Nitride (TaN) Sputtering Targets

Tantalum Nitride (TaN) Sputtering Targets

    Tantalum Nitride (TaN) Sputtering Targets


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Tantalum Nitride (TaN) Specifications

Material Type

Tantalum Nitride

Symbol

TaN

Color/Appearance

Black, Crystalline Solid

Melting Point (°C)

3,360

Theoretical Density   (g/cc)

16.3

Z Ratio

**1.00

Sputter

RF, RF-R

Max Power Density

(Watts/Square Inch)

20*

Type of Bond

Indium, Elastomer

Comments

Evaporate Ta in 10-3 Torr N2.

Material Type

Tantalum Nitride

 


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