Yttrium Oxide (Y2O3) Sputtering Targets

Yttrium oxide is a chemical compound with a chemical formula of Y2O3. It is white in color with a melting point of 2,410°C, a density of 5.01 g/cc, and a vapor pressure of 10-4 Torr at ~2,000°C. It is considered to be the most important yttrium compound. Yttrium oxide is used to make phosphors which provide the color red in televisions and yttrium iron garnets are an important element of microwave filters. It is evaporated under vacuum for the fabrication of semiconductors and passive components.

Yttrium Oxide (Y2O3) Specifications：