Input Power
| ·Single phase 110 VAC, 50 / 60 Hz
·1000 W (including vacuum pump and water chiller) |
Magnetron Sputtering Head
| ·Three 2" magnetron sputtering heads with water cooling jackets are included and inserted into quartz chamber via quick clamps
·RF cable replacement can be purchased at CYKY
·One manually operated shutter is built on the flange
·One 10 L/min digitally controlled recirculating water chiller is included for cooling sputtering heads |
Sputtering Target | ·Target size requirement: 2" diameter x 1/8" thickness max
·Sputtering distance range: 50 - 80 mm adjustable
·Sputtering angle range: 0 - 25° adjustable
·2" diameter Cu target and Al2O3 target are included for demo testing
·Various oxide 2" sputtering targets are available upon request at extra cost
·For target bonding, 1 mm and 2 mm copper backing plates are included. |
Vacuum Chamber | ·Vacuum chamber: 300 mm OD x 500 mm Height, made of stainless steel
·Sealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring
·Stainless steel shield cage is included for 100% shielding of RF radiation from the chamber
·Max vacuum level: 1.0E-5 Torr with optional turbo pump and chamber baking |
Sample Holder | ·Sample holder is a rotatable and heatable stage made of ceramic heater with stainless steel cover
·Sample holder size: 50 mm Dia. for. 2" wafer max
·Rotation speed: 1 - 10 rpm adjustable for uniform coating
·The holder temperature is adjustable from RT to 600 °C max (5 min max at 600 °C; 2 hr max at 500 °C) with accuracy +/- 1.0 °C via a digital temperature controller |
Vacuum Pump | ·KF40 vacuum port is built in for connecting to a vacuum pump.
·Vacuum level: 1.0E-2 Torr with included dual stage mechanical pump
1.0E-3 Torr with optional turbo pump |
Size | 540 mm L x 540 mm W x 1000 mm H |
Packing Weight | About 145 kg |
Warranty | One years limited warranty with lifetime support |
Whether to support customization | yes |
