Three targets DC magnetron sputtering coater equipment is a special laboratory coating machine developed by our company. The Three targets DC magnetron sputtering coater equipment can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Three targets DC magnetron sputtering coater equipment is a special laboratory coating machine developed by our company. The Three targets DC magnetron sputtering coater equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.
After compact design, the balance of volume and performance is realized, the appearance is beautiful and the function is comprehensive. The whole machine is controlled by touch screen and built-in one button coating program, which is easy to operate and is an ideal equipment for preparing thin films in laboratory.
Sample table parameters
Magnetron sputtering head parameters
Size:2 inches x3
Water cooled, flow 10L/min required
10L/min Circulating water cooling
φ300mm x 340mm H
open type, easy to replace target
Gas flow controller
A molecular pump system, pumping 600L/S
Quartz vibrating film thickness gauge
One set, resolution 0.10 angstrom
Sputter power source
DC power supply:500W, Suitable for preparing metal films
All-in-one computer operation
1090mm x 900mm x 1250mm
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On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.