Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.
Desktop single target magnetron sputtering coater application range:
The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.
Technical parameters of single target magnetron sputtering coater:
Reciprocating sample table | size | 50*100mm |
Reciprocating speed | 0~50mm/s |
Magnetron target gun | Target head plane | Circular flat target |
Sputtering vacuum | 10Pa～0.2Pa |
Target diameter | 2 inches |
Target thickness | Recommended 2~5mm |
Target head temperature | ≦65℃ |
Vacuum chamber | Chamber size | About Φ180mm × H 215mm |
Chamber material | High purity quartz |
Observation window | Omnidirectional transparency |
Opening method | Removable top cover |
Power supply | DC power supply | 150W max |
Quantity | 1 |
Molecular pump system | Backing pump | Rotary vane pump | VRD-4 |
Pumping speed | 1.1L/S |
Ultimate vacuum | 5*10-1Pa |
Molecular pump | Molecular pumping speed | 600L/S |
Rated speed | 24000rpm |
Ultimate vacuum | 5*10-5Pa |
Vibration value | ≦0.1um |
Start Time | ≦4.5min |
Downtime | <7min |
cooling method | Water cooling + air cooling |
Water chiller | Cooling water temperature | ≦37℃ |
Cooling water flow rate | 10L/min |
Supply voltage | AC220V 50Hz |
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