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Desktop double head magnetron sputtering coating machineDesktop double head magnetron sputtering coating machineDesktop double head magnetron sputtering coating machine

Desktop double head magnetron sputtering coating machine

    This equipment is a double target magnetron sputter coating machine, which can be used in the preparation of metal films, in the fields of electronics, optics, special ceramics, etc. it can also be used to prepare SEM samples in laboratory.

This equipment is a double target magnetron sputter coater machine, which can be used in the preparation of metal films, in the fields of electronics, optics, special ceramics, etc.this double target magnetron sputter coater can also be used to prepare SEM samples in laboratory.

It adopts high vacuum stainless steel chamber, front door opening design, and quartz observation window on the door, which is convenient for the observation and recording of the experiment. At the same time, the equipment is equipped with a rotary heating sample table, which can effectively improve the film uniformity and film quality. A set of baffle plate is installed on the top cover, and the two targets can be switched by rotating the baffle plate to realize multilayer coating.

This equipment needs to be used together with high vacuum molecular pump group. Users can choose imported brand small molecular pump to further save installation area.

At the same time, the model can be equipped with film thickness meter components, which can monitor the film thickness in real time and provide reliable parameters for the experimental process.

double target magnetron sputter coater technical parameters:

Sample stage

Size

100mm

Heating

≤500℃

Rotation speed

1-20r/min

Temp control

±1℃

Magnetron sputter head

Quantity

2” x2

Cooling mode

Water cooled

Vacuum chamber

Size

Dia 210mm× 260mm

Watch window

φ40mm

Material

SUS

Open mode

Front opening

Sputter power supply

DC power supply

1 set

Output power

≤300W

Output voltage

≤600V

response time

<5ms

Water cooling

Tank capacity

9L

Flow

10 L/min

Film thickness gauge

Accuracy

0.1angstrom

Cooling mode

Water cooling

Other

Power supply

AC220V,50Hz

Total power

4kw

Molecular pump system

Backing pump

Rotary vane pump

Pumping

1.1L/s

Secondary pump

turbo molecular pump (domestic)

Pumping

600L/s

Extraction interface

KF40

Air outlet

KF16


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