CY-MSP500S-DCRF-RE is a laboratory magnetron sputtering coater with two target positions developed by our company. this magnetron sputtering coater is equipped with a DC power supply and a RF power supply, which can be used to prepare single or multilayer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc.
CY-MSP500S-DCRF-RE is a laboratory-specific magnetron sputtering coater with two target positions developed by our company. The magnetron sputtering coater equipment is equipped with a DC power supply and a radio frequency power supply, which can be used to prepare single or multilayer iron Electrical film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc.
a. Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy and speed, high coating rate, low sample temperature rise, and is a typical high-speed low-temperature sputtering.
b. The magnetron sputter target is equipped with a water-cooled interlayer. The water-cooled machine can effectively take away the heat and avoid the heat accumulation on the target surface, so that the magnetron sputter can work stably for a long time.
c. The sample stage adopts a reciprocating design, and the left side is equipped with a magnetic coupling push rod, which can push the sample stage left and right.
d. The whole machine adopts touch screen control, built-in one-button coating program, easy to operate, it is an ideal equipment for laboratory preparation of films
Ultimate vacuum degree
Sample table parameters
100mm x 100mm
Magnetron sputtering head parameters
Water cooled, required flow rate10L/min
10L/min circulating water cooling
φ500mm x 490mm H
front opening door
Gas flow controller
1channel 200sccm Ar;
Molecular pump system pumping 600L/S
Film thickness gauge
Quartz vibrating film thickness gauge, one set, Resolution 0.10 Å
Sputter power supply
DC power supply: one set, 500W, for preparing metal films
RF power supply: one set, 500W, for non - metallic coating
All-in-one computer operation
1090mm x 900mm x 1250mm
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On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.