This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.
This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.
This model can be equipped with a film thickness meter, which can monitor film thickness data in real time and provide reliable parameters for the experimental process.
Using a quartz vacuum chamber, the coating process is omnidirectionally visible, which is convenient for observation and recording of experiments.
The chamber design is convenient and easy to clean, which is very suitable for laboratory use.
At the same time, the equipment is equipped with a rotating heating sample stage, which can effectively improve the uniformity of the film and the quality of the film.
The whole machine adopts modular design, simple operation logic and intuitive operation interface, which is easy to get started.
Sample stage | Size:100mm Rotary speed:1-20r/min Heating temperature:≤500℃ Temperature control accuracy:±1℃ |
Magnetron sputtering head | Quantity: one piece Size:2-inch Cooling mode:water cooling |
Vacuum chamber | Size:φ180mm x 215mm Watch window:Omani-directional visual Material:high purity quartz Opening mode:Removable top cover |
DC power supply | Quantity:1set Output power:≤300W Output voltage:≤600V Response time:<5ms |
Water cooling | Tank capacity:9L Flow:10L/min |
Film thickness gauge | Measuring accuracy:0.1 angstrom Cooling mode:water cooled |
Other | Power supply:AC220V,50Hz Whole power:1kw |
Note:
This equipment does not contain a vacuum pump. Users should use it with a molecular pump set. We recommend our CY-GZK103A pump set.
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