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Desktop single target magnetron sputtering coater with film thickness gaugeDesktop single target magnetron sputtering coater with film thickness gaugeDesktop single target magnetron sputtering coater with film thickness gauge

Desktop single target magnetron sputtering coater with film thickness gauge

    This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.

This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.

This model can be equipped with a film thickness meter, which can monitor film thickness data in real time and provide reliable parameters for the experimental process.

Features:

Using a quartz vacuum chamber, the coating process is omnidirectionally visible, which is convenient for observation and recording of experiments.

The chamber design is convenient and easy to clean, which is very suitable for laboratory use.

At the same time, the equipment is equipped with a rotating heating sample stage, which can effectively improve the uniformity of the film and the quality of the film.

The whole machine adopts modular design, simple operation logic and intuitive operation interface, which is easy to get started.

Desktop single target magnetron sputtering coater technical parameters:

Sample stage

Size:100mm

Rotary speed:1-20r/min

Heating temperature:≤500℃

Temperature control accuracy:±1℃

Magnetron sputtering head

Quantity: one piece

Size:2-inch   

Cooling mode:water cooling

Vacuum chamber

Size:φ180mm x 215mm

Watch window:Omani-directional visual

Material:high purity quartz

Opening mode:Removable top cover

DC power supply

Quantity:1set

Output power:≤300W

Output voltage:≤600V

Response time:5ms

Water cooling

Tank capacity:9L

Flow:10L/min

Film thickness gauge

Measuring accuracy:0.1 angstrom

Cooling mode:water cooled

Other

Power supply:AC220V,50Hz

Whole power:1kw

Note: 

This equipment does not contain a vacuum pump. Users should use it with a molecular pump set. We recommend our CY-GZK103A pump set.


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  • Fax: +86 371 8603 6875
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