This equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The Desktop single sputter head magnetron sputtering coater equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise.
Desktop single sputter head magnetron sputtering coater technical parameter:
Sample stage | Size | φ100mm |
Heating | Max. 500℃ |
Rotating speed | 0-20rpm adjustable |
Magnetron sputtering head | Quantity | 2" x1 |
Vacuum chamber | Chamber size | φ180mm x 215mm |
Observation window | Omnidirectional transparent |
Chamber material | High purity quartz |
Open method | Upper cover removable |
Vacuum system | Mechanical pump | Rotary vane pump |
Pumping port | KF16 |
Exhaust interface | KF16 |
Molecular pump | Turbomolecular pump |
Pumping port | KF40 |
Exhaust interface | KF40 |
Vacuum measurement | Resistance gauge + ionization gauge |
Ultimate vacuum | 1.0E-4Pa |
Power supply | AC 220V 50/60Hz |
Pumping rate | Mechanical pump 1.1L/s Molecular pump 600L/s |
Power configuration | Quantity | DC power supply x1 |
Max. output power | DC power supply 150W |
Supply voltage | AC220V, 50Hz |
Others | Total power | 2kW |
Overall size | 550mm x 350mm x 400mm |
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