CY-MSP500S-DCRF-B is a special laboratory coating machine with two targets developed by our company. this magnetron sputtering coater machine is equipped with a DC power supply and a RF power supply. It can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
CY-MSP500S-DCRF-B is a special laboratory coating machine with two targets developed by our company. this magnetron sputtering coater machine is equipped with a DC power supply and a RF power supply. this magnetron sputtering coater machine can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
a. Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;
b. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time;
c. This model adopts the layout of under target, the sample table is on the top, and the height with the target surface can be precisely adjusted by program, and can be rotated and heated, with excellent performance.
Ultimate vacuum degree
Sample table parameters
70 mm adjustable
Magnetron sputtering head parameters
Water cooled，required flow rate10L/min
10L/min circulating water cooling
500mm Dia. × 490mm H
front opening door
Gas flow controller
1channel 200sccm Ar；
Molecular pump system pumping,600L/S
Film thickness gauge
Quartz vibrating film thickness gauge ，
one set，Resolution 0.10 Å
Sputter power supply
DC power supply：one set，500W，for metal films
RF power supply：one set，500W，for non-metallic films
All-in-one computer operation
1090mm x 900mm x 1250mm
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On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.