Single target magnetron sputtering coater with tiltable sample stage
This equipment is a single-target magnetron sputtering coater with a tiltable sample stage. The angle between the sample stage and the target surface is adjustable, and it can be used to make films with specific growth angles. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements.
This equipment is a single-target magnetron sputtering coater with a tiltable sample stage. The angle between the sample stage and the target surface is adjustable, and magnetron sputtering coater can be used to make films with specific growth angles. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering of metal and other conductive materials. The vacuum system of the equipment adopts turbomolecular pump group, which has fast pumping speed, high ultimate vacuum degree and excellent vacuum performance. This equipment has a compact structure and perfect functions and is easy to use, and is very suitable for various coating tests.
magnetron sputtering coater technical parameters：
CY-MSP180S-DC-GU
Sample stage
Size
Φ60mm
Rotating speed
0-20 adjustable
Magnetron sputtering target
Quantity
2” x1
Vacuum chamber
Chamber size
Φ180mm x 150mm
Observation window
Omnidirectional visibility
Chamber material
High purity quartz
Opening method
Top cover removable
Lower flange
Including sample table tilt mechanism and rotation mechanism
Vacuum system
Mechanical pump
Two-stage rotary vane pump
Pumping interface
KF16
Molecular pump
Turbomolecular pump
Pumping interface
KF40
Vacuum measurement
Resistance gauge + ionization gauge
Exhaust interface
KF40
Ultimate vacuum
1.0E-3Pa
Power supply
AC 220V 50/60Hz
Pumping rate
Backing pump: 1.1L/s Molecular pump: 60L/S
Power configuration
Quantity
DC power supply x1
Maximum output power
DC power supply 300W
Other
Supply voltage
AC220V, 50Hz
Dimensions
500mm x 320mm x620mm
Total power
2kW
magnetron sputtering coater video:
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