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CY-MSP180G-PST Planetary single target magnetron sputtering coaterCY-MSP180G-PST Planetary single target magnetron sputtering coaterCY-MSP180G-PST Planetary single target magnetron sputtering coater

CY-MSP180G-PST Planetary single target magnetron sputtering coater

    This equipment is a desktop planetary single-target magnetron coater. The lower half of the cavity is made of stainless steel and the upper part is made of high-purity quartz. It has good vacuum performance and can accommodate complex sample stages. 

This equipment is a desktop planetary single-target magnetron coater. The lower half of the cavity is made of stainless steel and the upper part is made of high-purity quartz. this magnetron sputting coater has good vacuum performance and can accommodate complex sample stages. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering of metal and other conductive materials. The vacuum system of the equipment adopts turbomolecular pump group, which has fast pumping speed, high ultimate vacuum degree and excellent vacuum performance. This equipment has a compact structure and perfect functions and is easy to use, and is very suitable for various coating tests. 

Magnetron sputting coater technical parameters:

CY-MSP180G-PST (Planetary sample stage) single target magnetron sputtering coater

Sample stage

Size

φ50mm x4

Rotation speed

The revolution speed is adjustable from 0-10rpm, and the revolution and rotation speed ratio is 1:5

Magnetron sputtering target

Quantity

2” x1



Vacuum chamber

Chamber size

Φ180mm x 100mm

Observation window

Omnidirectional visibility

Chamber material

High purity quartz

Opening method

Top cover removable

Lower flange

Contains planetary transmission mechanism, welded vacuum interface and intake valve

Vacuum system

Mechanical pump

Two-stage rotary vane pump

Pumping interface

KF16

Molecular pump

Turbomolecular pump

Pumping interface

KF40

Vacuum measurement

Resistance gauge + ionization gauge

Exhaust interface

KF40

Ultimate vacuum

1.0E-3Pa

Power supply

AC 220V 50/60Hz

Pumping rate

Backing pump:1.1L/s Molecular pump: 60L/S

Power configuration

Quantity

DC power supply x1

Maximum output power

DC power supply 300W

Other

Supply voltage

AC220V, 50Hz

Overall size

500mm x 320mm x620mm

Total power

2kW



Magnetron sputtering coater video:


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