This equipment is a desktop planetary single-target magnetron coater. The lower half of the cavity is made of stainless steel and the upper part is made of high-purity quartz. It has good vacuum performance and can accommodate complex sample stages.
This equipment is a desktop planetary single-target magnetron coater. The lower half of the cavity is made of stainless steel and the upper part is made of high-purity quartz. this magnetron sputting coater has good vacuum performance and can accommodate complex sample stages. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering of metal and other conductive materials. The vacuum system of the equipment adopts turbomolecular pump group, which has fast pumping speed, high ultimate vacuum degree and excellent vacuum performance. This equipment has a compact structure and perfect functions and is easy to use, and is very suitable for various coating tests.
CY-MSP180G-PST (Planetary sample stage) single target magnetron sputtering coater | ||||
Sample stage | Size | φ50mm x4 | Rotation speed | The revolution speed is adjustable from 0-10rpm, and the revolution and rotation speed ratio is 1:5 |
Magnetron sputtering target | Quantity | 2” x1 | ||
Vacuum chamber | Chamber size | Φ180mm x 100mm | Observation window | Omnidirectional visibility |
Chamber material | High purity quartz | Opening method | Top cover removable | |
Lower flange | Contains planetary transmission mechanism, welded vacuum interface and intake valve | |||
Vacuum system | Mechanical pump | Two-stage rotary vane pump | Pumping interface | KF16 |
Molecular pump | Turbomolecular pump | Pumping interface | KF40 | |
Vacuum measurement | Resistance gauge + ionization gauge | Exhaust interface | KF40 | |
Ultimate vacuum | 1.0E-3Pa | Power supply | AC 220V 50/60Hz | |
Pumping rate | Backing pump:1.1L/s Molecular pump: 60L/S | |||
Power configuration | Quantity | DC power supply x1 | Maximum output power | DC power supply 300W |
Other | Supply voltage | AC220V, 50Hz | Overall size | 500mm x 320mm x620mm |
Total power | 2kW |
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