This equipment is a single-target magnetron optical fiber winding sputtering coater, which is specially used for preparing thin films from optical fibers.
This set is equipped with a stainless steel high vacuum chamber, equipped with an observation window with a baffle, which can observe the coating process, and the baffle can effectively prevent the observation window from being shielded by the film layer, which is convenient for experimental observation and recording. The top-opening design of the cavity is convenient to open and easy to clean, which is very suitable for laboratory use. The whole machine adopts modular design, the operation logic is simple, and the operation interface is intuitive, which is convenient for getting started.
sputtering coater Technical Parameters:
Wire winding mechanism | Dimension | Φ15mmx245mm |
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| Winding speed | 1-300r/min |
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Magnetron Sputtering Head | Quantity | 2 inches x1 | Colling method | Wster cooling |
Vacuum chamber | Cavity size | Φ213mm X 307mm | Observation window | φ80mm |
Cavity material | Stainless Steel 304 | Open method | Top opening, left opening |
Power configuration | Number of DC Power Supplies | 1 set | Output Power | ≤300W |
Matching method | Automatch |
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Cooling system | Tank volume | 9L | Flow | 10L/min |
Air supply system | Type | Manual micro-control valve |
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Vacuum system | Foreline pump | Bipolar Rotary Vane Pump | Pumping speed | 1.1L/s |
Secondary pump | Turbomolecular pump | Pumping speed | 60L/s |
Air outlet | ISO63 | Air outlet | KF16 |
Vacuum gauge | Compound Vacuum Gauge |
Other | Supply voltage | AC220V,50Hz | Total power | 2kw |
