Automatic Ultrasonic Atmosphere Heating Spin Coater

Automatic Ultrasonic Atmosphere Heating Spin Coater is a 300mm diameter, flexible rotary glue dispenser. It can spray the glue on the substrate through an ultrasonic nozzle, and then rotate at a high speed to make the glue evenly coated on the substrate. The spin coating operation can also be perfor,There is a heating element in the cavity, which can be baked after the glue is mixed. The product has a gas path controlled by two-way float flowmeter, which can pass inert gas into the cavity to protect the glue liquid from the influence of gas in the air during glue mixing. This type of glue dispenser is suitable for surface coating of semiconductor silicon wafers, glass slides, wafers, substrates, ITO conductive glass and other processes and plate making. The maximum wafer size that can be glued is 12 inches, the speed can reach 3000rpm, and the acceleration can reach 2000rpm; it has the advantages of stable speed, quick start, convenient operation, etc., and can ensure the consistency and uniformity of the glue thickness. It is a performance Excellent product.

Ultrasonic Atmosphere Heating Spin Coater Product features:

1. Adopt DC brushless motor, controlled by single chip microcomputer

2. High-definition touch screen control

3. Single-step multi-step glue mixing operation can be performed, five programs can be stored, and five-step operations can be set for each program

4. Anti-blocking glue design

5. Aluminum alloy cavity, sturdy and durable

6. With ultrasonic, atmosphere, heating and other auxiliary functions, it can provide various auxiliary functions for the research of glue mixing

Ultrasonic Atmosphere Heating Spin Coater Product parameters:

Ultrasonic system

Injection pump

Flowmeter