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Fully automatic ultrasonic assisted atmosphere heating spin coaterFully automatic ultrasonic assisted atmosphere heating spin coaterFully automatic ultrasonic assisted atmosphere heating spin coater

Fully automatic ultrasonic assisted atmosphere heating spin coater

    CY-SPC-HUA6 is a small and flexible spin coater, which can spray the glue on the substrate through the ultrasonic nozzle, and then evenly apply the glue on the substrate through high-speed rotation. It is also possible to directly perform the spin coating operation alone.

CY-SPC-HUA6 is a small and flexible spin coater, which can spray the glue on the substrate through the ultrasonic nozzle, and then evenly apply the glue on the substrate through high-speed rotation. It is also possible to directly perform the spin coating operation alone.

1. The chamber is equipped with heating elements, which can be baked after spinning coating

2. The product has a gas path controlled by a 2-way float flowmeter, which can pass inert gas into the chamber to protect the glue liquid from the gas in the air when spinning coating

3. This machine is suitable for surface coating of semiconductor wafer, slide, wafer, substrate, ITO conductive glass and other processes and plate making.

4. The maximum size of the crystallizable wafer is 6 inches, the rotational speed can reach 10000rpm, and the acceleration can reach 5000rpm;

5. It has the advantages of stable speed, quick start, convenient operation, etc., and can ensure the consistency and uniformity of the thickness of spinning coating.

Features of spin coater:

1. Adopt DC brushless motor, single chip microcomputer control

2. High-definition touch screen control

3. Single step and multi-step spinning coating operation can be carried out, five programs can be stored, and each program can be set with five steps of operation

4. Anti-blocking glue design

5. Aluminum alloy chamber, durable

6. It has various auxiliary functions such as ultrasonic, atmosphere, heating and so on, which can be used for spinning coating research

Technical parameters of spin coater:

Spin coater

Name

ultrasonic assisted atmosphere spin coater

Substrate size

6inches

Rotation speed

100~10000rpm adjustable

Rotational acceleration

100~5000rpm/s adjustable

Longest spinning time(a single time)

3000s

chamber size

Φ200mm* 90mm

Voltage

220V 50Hz

Power

400W

Heating Temp

0-100℃

Warranty

1 year, life-long technical support, excluding vulnerable parts

Ultrasonic system

Atomizing head Material

Titanium alloy

Frequency

40kHz

Power

130W

Flow

0.55mL/s

Particle diameter

25um

Atomizing head type

Cone type

Atomizing head weight

0.3kg

Ultrasonic power supply

Size:315*312*135mm,weight:5kg

Syringe pump

Flow range

0.001uL/min-43.349mL/min

Power down memory function

Save the setting parameters, no need to set them after power on again

Injector

10uL-1000uL

Syringe

1mL-60mL

Linear speed range

5um/min-65um/min

Linear speed adjustment resolution

5um/min

Maximum stroke

140mm

Travel resolution

0.156um

Rated linear thrust

90N

Flowmeter

Control gas type

2

Gas flow rate

16-160mL/min


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  • Fax: +86 371 8603 6875
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