This equipment is a small desktop thermal evaporation coater especially designed for high vacuum , it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials. The vacuum chamber is opened by lifting the cover to facilitate lofting. The chamber is equipped with an adaptive observation window with a baffle for observing the coating process. The baffle can effectively prevent the observation window from being polluted by the film material.
Technical Parameters：
product name | Small high vacuum dual source thermal evaporation coater |
Product number | CY-EVZ254-II-HH-SS |
sample stage | size | φ60mm |
Rotating speed | 1-20rpmAdjustable |
Distance to evaporation source | 60mm~100mmAdjustable |
evaporation system | evaporation source | Tungsten wire basket |
Thermocouple | S type thermocouple |
maximum temperature | 1800℃ |
vacuum chamber | Cavity size | φ254mm×300mm |
observation window | Quartz viewing window φ80 |
Opening method | Top open type |
Cavity material | Stainless steel |
Vacuum system | Product number | CY-GZK103-A |
Air extraction interface | KF40 |
Molecular pump | 60l/s |
Exhaust interface | KF16 |
Front pump | Rotary vane pump |
Vacuum measurement | Composite vacuum gauge |
ultimate vacuum | 1.0E-5Pa |
Pumping rate | Molecular pump: 60L/S Rotary vane pump: 1.1L/S Comprehensive pumping performance: vacuum degree can reach: 1.0E-4Pa in 20 minutes |
other | Supply voltage | AC220V,50Hz |
Total power | 2kw |
Overall size | 600mm× 300mm× 470mm |
Total Weight | 40kg |
