The magnetron target head of the DC magnetron sputtering coater has 1 inch and 2 inches to choose from. Customers can choose the target according to the size of the substrate to be plated. The device is equipped with 150W DC power supply, which can be used for metal sputter coating. The coating machine is equipped with gas inlet port for the introduction of protective gas. If the customer needs the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs. The instrument is equipped with advanced turbomolecular pump set, the ultimate vacuum is up to 1.0E-5pa, and other types of molecular pumps are also available.
Small desktop single-target DC magnetron sputtering coater application:
The device can be used to prepare single-layer ferroelectric thin films, conductive films, alloy films, and so on. Compared with similar equipment, the single-target magnetron sputtering coater is compact, highly integrated and small in size, and can be placed on a desktop. It is an ideal equipment for laboratory preparation of material films.
Small desktop single-target DC magnetron sputtering coater technical parameters:
Sample stage | Size | φ138mm |
Heating temperature | Max 500℃ |
Temperature accuracy | ±1℃ |
Rotational speed | 1-20rpm adjustable |
Magnetron Sputtering head | Quantity | 2”×1 (1”, 2” optional) |
Cooling mode | Water cooling |
Water chiller | Circulating water chiller with flow rate of 10L/min |
Vacuum chamber | Chamber size | φ180mm×215mm |
Chamber material | High purity quartz |
Watch window | Fully transparent |
Opening mode | Top cover removable |
Mass flowmeter | 2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs) |
Vacuum system | Model | CY-GZK103-A |
Molecular pump | CY-600 |
Backing pump | Rotary vane pump |
Ultimate vacuum | 1.0E-5Pa |
Pumping interface | KF40 |
Exhaust interface | KF16 |
Vacuum measurement | Compound vacuum gauge |
Power supply | AC;220V 50/60Hz |
Pumping rate | Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
Power configuration | Quantity | DC power supply×1 |
Max output power | 150W |
Other parameters | Supply voltage | AC220V,50Hz |
Total power | 1.7KW (Vacuum pump 1.5KW+machine 0.2KW) |
Overall size | 500mm×350mm×400mm |
Total Weight | About 30kg |
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