The multi vacuum chamber coating system (cluster type multi-chamber coating system) can be built by using this system, and the samples can be automatically sent and transferred between each vacuum chamber. The system adopts Siemens servo control system to realize the operation control of the transfer manipulator, which is reliable, accurate and fast.
automatic transmission control sample
four stations, six-station system
touch screen operation, the operation parameters can be set up
RS232 control interface
plugins sample library
Technical parameters:
Project | Four-station | Four station | Instructions |
Supply voltage | AC220V/50Hz/1.2kW |
|
Number of | 4 | 6 | Include sample |
Transfer chamber | 420 x 420mm | 580 x 580mm |
|
Drive arm length | 140mm | 200mm |
|
Sample diameter: | <=200mm | Large size can be customized |
Maximum delivery distance | 540mm | 820mm | Sample diameter |
490mm | 770mm | Sample diameter |
Diameter of external vacuum chamber | <=480mm | <=886mm | Sample diameter |
<=380mm | <=786mm | Sample diameter |
Manipulator lifting | <=12mm |
|
Transfer sample thickness | 0.3 ~ 4 mm |
|
Vacuum interface | KF40 |
|
Ultimate vacuum | 3.0x10-4Pa (Molecular Pump) |
|
Operating interface | Touch screen |
|
External control | RS232, ModBus protocol |
|
Service ambient temperature | The < 35 ℃ |
|
Ambient humidity for | <75%(relative humidity) no condensation |
|
Use ambient altitude | <2000m |
|
Exterior size | 420x420x1300mm | 580x580x1300mm | (L x W x H) |
Weight | About 85kg | About 105kg | Vacuum unit and isolation valve are not included |
