Three target magnetron sputtering coating machine (DC power supply + RF power supply) |
Sample table | Sputtering mode | Sputtering orientation upwards, the sample stage is located above
the sputtering target；Center top setting sample holder, with one shutter |
Sample holder | φ150mm |
Control accuracy | ±1℃ |
Heating range | Room temperature～500℃ |
Adjustable speed | 1-20rpm adjustable |
Target base distance adjustable | The distance between the target and the substrate can be adjusted electrically |
Magnetron target gun | Target plane | Circular plane target |
Sputtering vacuum | 10Pa～0.2Pa |
Target diameter | 50～50.8mm |
Target thickness | 2～5mm Note: if the target is magnetic material (such as Fe, Co, Ni), the
thickness cannot be more than 1.5mm,and strong magnetic sputtering gun
is required, will need extra charge. |
Insulation voltage | >2000V |
Quantity | 2 inches*3；with shutters for each gun |
Cable specification | SL-16 |
Target head temperature | ≦65℃ |
Vacuum chamber | Inner wall treatment | Electrolytic polishing |
Chamber size | φ300mm × 350mm |
Chamber material | 304 stainless steel |
Observation window | Quartz window, diameter φ100mm with shutter |
Sealing method | Viton seal |
Open method | Top opening, cylinder auxiliary support |
Gas control system | Flow control | 3-way mass flow meter: Oxygen: range 0～100SCCM Argon gas: range 0～200SCCM Nitrogen: range 0～500SCCM (Note: In order to achieve a higher oxygen-free environment, the vacuum chamber mustbe cleaned with high-purity inert gas at least 3 times.) |
Gas type | Argon, nitrogen, oxygen, and other inert gases |
Control valve type | Solenoid valve |
Control valve static state | Normally closed |
Measuring linearity | ±1.5% F.S |
Measurement repeatability | ±0.2% F.S |
Measuring response time | ≤8 seconds（T95） |
Working pressure range | 0.3MPa |
Valve body pressure | 3MPa |
Working temperature | （5～45）℃ |
Body material | Stainless steel 316L |
Valve body leakage rate | 1×10-8Pa.m3/s |
Pipe joints | 1/4″Compression fitting |
Input and output signal | 0～5V |
Power supply | ±15V（±5%）（＋15V 50mA, －15V 200mA） |
Overall dimensions (mm) | 130 (width) × 102 (height) × 28 (thickness) |
Communication Interface | RS485 MODBUS protocol |
DC power supply | Power supply | 500W |
Output voltage | 0～600V |
Maximum output current | 1A |
Timing length | 65000 S |
Starting time | 1～10 S |
Quantity | 2 sets |
RF power supply | Power supply | 500W |
Power output range | 0W-500W, with auto match |
Maximum reflected power | 100W |
RF frequency | 13.56MHz+/-0.005% stability |
Power stability | ≤5W |
Harmonic component | less than -50dbc |
Quantity | 1 set |
