This equipment is a single-target magnetron sputtering coater,it can be used in the preparation of metal film,and also used in electronic fields,optical fields,special field of ceramic preparation ,it surely can be used in SEM sample preparation in laboratory。
This set is single-target magnetron sputtering coater equipped with high vacuum stainless steel cavity, the cavity is set with a quartz observation window baffle, which is easy to observe and record the experiment; The cavity design with excellent vacuum performance and small shape makes it very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the film uniformity and film quality. The machine adopts modular design, simple operation logic, and intuitive operation interface, easy to get started.
Technical Parameters：
product name | Desktop stainless steel cavity single target magnetron sputtering coating apparatus |
Product number | CY-MSZ254-I-DC-SS |
sample stage | Dimensions | φ100mm |
Heating temperature | ≦500℃ |
Adjustable speed | ≦20rpm |
Magnetic target gun | Equipped with a two-inch magnetic control target, target size: diameter 50.8mm, thickness ≦3mm |
vacuum chamber | Cavity size | φ254mm X 300mm |
observation window | omnidirectionally transparent |
Cavity material | 304 stainless steel |
Opening method | Removable top cover |
Vacuum system | Backing pump | Low noise bipolar rotary vane pump |
Molecular pump | Low noise and high pumping speed turbomolecular pump |
Vacuum measurement | Composite vacuum gauge, range: 10-5~105Pa |
Air extraction interface | KF16 |
Air extraction interface | KF40 |
Exhaust interface | KF16 |
System vacuum | 1.0×10-4Pa |
Power supply | AC 220V 50/60Hz |
Pumping rate | The pumping speed of the molecular pump is 600L/s, and the pumping speed of the backing pump is 1.1L/s. |
Power configuration | Number of power supplies | A set of DC power supply |
Output Power | DC power supply 300W |
Other parameters | Supply voltage | AC220V,50Hz |
Total power | 2kW |
Overall size | 550mm X 350mm X450mm |
