Product name | Electron beam evaporation coating mmachine |
Product model | CY-EBH500-SS |
Service condition | Ambient temperature ranged from 5 to 40℃ |
Source | Three phase 380V |
Voltage | 220V 50HZ |
Power | <20 kW |
Water gage | <2.5bar |
Plated layer monitoring | Using SQM160 membrane thickness monitor, the inhomogeneity of coating thickness is less than 6%. |
Heat lamp | Four halogen heating lamps were used for degassing and one neon lamp for lighting |
The electrode interface | With a 2-way metal evaporation electrode interface, backup |
Water cooling system | Water pressure monitoring |
Observation window | 100mm in diameter, with X-ray filter glass |
Control system | Touch screen system |
Vacuum chamber dimensions | Evaporation chamber dimensions: Φ 500 * H500mm |
Electron gun | New electronic gun, a 6-hole crucible |
Sample turntable | Sample size: <150mm, the sample table can rotate, the sample table surface and the electron gun surface distance adjustment up and down, the adjustment distance is 200mm-250mm, the sample table can be heated, heating temperature <500℃. |
System vacuum degree | A. Limit vacuum: baking for 12~24 hours, continuous pumping, vacuum less than 5x10-5Pa B. Extraction rate: a vacuum <5x10 in 40 minutes, starting from the atmosphere-4Pa C. System leakage rate: after 12 hours of shutdown, measure the vacuum degree of the vacuum chamber is <10Pa |
The vacuum unit | FB1200 Molecular pump + VRD-16 front stage pump + side extraction valve + gate valve + cut-off valve + composite vacuum meter + coating monitoring vacuum meter interface (standby) |
