This instrument is a high vacuum evaporation coating instrument, tungsten wire basket (or tungsten boat) used as the evaporation source, and the distance between the sample table and the evaporation source is adjustable. The instrument can steadily evaporate metals and certain organics. High vacuum stainless steel chamber, good sealing performance, good vacuum performance. The chamber is equipped with viewing Windows so that the coating process can be seen. The ultimate vacuum 10E-4Pa of the molecular pump system can effectively improve the coating quality and meet the vacuum environment required for most evaporative coating experiments.
High vacuum thermal evaporation coating instrument uses:
Coil evaporation coater can be used for film growth of different kinds of materials, most metals and some organic materials films, such as metals, semiconductors, oxides, etc.
High vacuum thermal evaporation coating instrument technical parameters:
Supply voltage | Single-phase, AC220V, 50Hz |
Inner wall treatment | Electrolytic polishing |
Cavity material | 304 stainless steel |
Cavity size | Horizontal Φ600mm x 500mm |
Viewing window | Front φ100mm including shading plate |
Opening mode | Front door type |
Rewinding | Φ200mmx300mm |
Speed | 60m/min(adjustable) |
Tension | Adjustable |
Number of parts | 1 set of metal evaporation source with independent baffle |
Electrode voltage | 10V |
Wire feed speed | ≤3m/min |
Evaporation current | The power is 2KW, the maximum current is 160A, and the adjustment accuracy is 1A |
Evaporator | Tungsten Boat, 1 count |
Front pump | Bipolar rotary vane pump, pumping speed 1.1L/s |
Turbomolecular pump | Pumping speed: 600L/s; Rated speed: 24000rpm; Startup time: ≦4.5min Cooling mode: water cooling + air cooling Intake interface: ISO150 Air outlet interface: KF40 Vacuum: 5.0*10-4Pa (5.0*10-6mbar) Vacuum to 5.0×10-3 Pa (5.0*10-5mbar) for less than 40 minutes |
Composite vacuum gauge | The measuring range is 105Pa~10-5Pa |
Measurement accuracy | 0.1Å |
Measured velocity | 100ms-1s/ time |
Measurement range can be set | 500000Å(aluminum) |
Standard sensor crystal | 6MHz |
Applicable crystal size | Φ14mm (standard with 10 pieces) |
Air compressor | Acting on electronically controlled pneumatic valve |
Water cooler | Cooling water temperature: ≦37℃ Flow rate: 10L/min Power: 0.1KW Cooling power: 50W/ C Tank capacity: 9L |
Control system | PLC automatic control Operation interface: Touch screen + operation panel |
