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Three target heads plasma sputtering coater CY-PSP180G-3TA Three target heads plasma sputtering coater CY-PSP180G-3TA

Three target heads plasma sputtering coater CY-PSP180G-3TA

    Three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design.

Three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 target heads according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. The instrument adopts touch screen control, which is simple and intuitive to use. It can realize the operation of coating start and stop, switch target head position and baffle rotation with one button, which is very suitable for laboratory purchase.

This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, you can contact the technician to select the molecular pump group to form a high vacuum system.

Two target heads plasma sputtering coater application

It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.

Three target heads plasma sputtering coater technical parameters:

Sample stage

Size

φ138mm

Temperature control   accuracy

±1

Heating temperature

Max 500

Rotate speed

1-20rpm adjustable

DC sputtering target   head

Quantity

2”×3



Vacuum chamber

Chamber size

φ180mm×150mm

Watch window

Omnidirectional   transparent

Chamber material

High purity quartz

Opening mode

Top cover removable

Vacuum system

Mechanical pump

rotary vane pump

Pumping interface

KF16

Vacuum measurement

Resistance gauge

Exhaust interface

KF16

Ultimate vacuum

1.0E-1Pa

Power supply

AC;220V 50/60Hz

Pumping rate

rotary vane vacuum pump: 1.1L/S

Power configuration

Quantity

DC power supply×1

Max output power

150W

 

Other parameters

Supply voltage

AC220V,50Hz

Overall size

360mm×300mm×470mm

Total power

800W

Total Weight

40kg

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

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