Three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design.
The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 targets according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. If the customer needs to pass the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs.
This film coater is equipped with a double stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, the technician can contact the technician to select the molecular pump group to form a high vacuum system.
It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.
Temperature control accuracy
DC sputtering target head
High purity quartz
Top cover removable
rotary vane pump
rotary vane vacuum pump: 1.1L/S
DC power supply×1
Max output power
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