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Small plasma sputtering coater with one sputtering source Small plasma sputtering coater with one sputtering source

Small plasma sputtering coater with one sputtering source

    Small plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design.

Small plasma sputtering coater The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 targets according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of precious metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. If the customer needs to pass the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs.

This film coater is equipped with a double stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, the technician can contact the technician to select the molecular pump group to form a high vacuum system.

Small plasma sputtering coater technical parameters:

Sample stage



Temperature control   accuracy


Heating temperature

Max 500

Rotate speed

1-20rpm adjustable

DC sputtering target   head


2” ×1 (1~3 targets optional)

Vacuum chamber

Chamber size


Watch window

Omnidirectional   transparent

Chamber material

High purity quartz

Opening mode

Top cover removable

Vacuum system

Mechanical pump

rotary vane pump

Pumping interface


Vacuum measurement

Resistance gauge

Exhaust interface


Ultimate vacuum


Power supply

AC;220V 50/60Hz

Pumping rate

rotary vane vacuum pump: 1.1L/S

Power configuration


DC power supply×1

Max output power


Other parameters

Supply voltage


Overall size


Total power


Total Weight


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  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Korea Distributor:
    NEO LFN Corp
    Contact:Haeseop Kim
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