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Small plasma sputtering coater CY-PSP180G-1TA

Small plasma sputtering coater CY-PSP180G-1TA

    Small plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design.

The small plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design. The plasma sputtering target is a standard size of 2 inches. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of precious metals such as gold, silver and copper. It is often used in the preparation of conductive films for laboratory scanning electron microscope samples. It is also called “gold spraying machine”. This film coater is equipped with a gas connection for the introduction of protective gas. If the customer needs to pass the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs.

This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, the technician can contact the technician to select the molecular pump group to form a high vacuum system.

Small plasma sputtering coater application:

It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.

Small plasma sputtering coater technical parameters:

Sample stage

Size

Φ60mm

Distance to the sputtering target

20mm~35mm adjustable

DC sputtering target head

Quantity

2”×1



Vacuum chamber

Chamber size

φ180mm×100mm

Watch   window

Omnidirectional transparent

Chamber material

High purity quartz

Opening   mode

Top cover removable

Vacuum system

Mechanical   pump

Rotary vane pump

Pumping interface

KF16

Vacuum   measurement

Resistance gauge

Exhaust   interface

KF16

Ultimate   vacuum

1.0E-1Pa

Power   supply

AC 220V 50/60Hz

Pumping   rate

rotary   vane vacuum pump: 1.1L/S

Power configuration

Quantity

DC power supply×1

Max   output power

150W

Other parameters

Supply   voltage

AC220V,50Hz

Overall   size

360mm×300mm×470mm

Total power

800W

Total   Weight

30kg


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