This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage. This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. The equipment is small in size and beautiful in appearance, making it the best choice for laboratory coating experiments.
Small plasma sputtering coater technical parameters:
Item | Detail |
Product model | CY-PSP180G-1TA |
Sample stage | Diameter φ60mm, height adjustable |
DC sputtering head | 2"x1 |
Chamber material | High purity quartz |
Chamber size | φ180mm x 100mm |
Vacuum pump | Rotary vane pump |
Ultimate vacuum | 1.0E-1Pa |
Vacuum interface | KF16 vacuum flange |
Gas inlet port | φ8 quick connector |
Power supply | AC 220V 50Hz |
Total power | 1.5KW |
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