The 1200℃rapid annealing furnace is essentially a set of slideway furnace, which realizes the functions of heating and annealing. The intake end is equipped with a high-precision three-way mass flow meter to accurately control the atmosphere in the tube;At the same time, the equipment is equipped with a turbo molecular pump, which can quickly achieve a high vacuum environment and maximize the interference of the air atmosphere to the experiment.
The slideway furnace is composed of 1200℃standard single heating zone tube furnace and high precision slide rail.Tube furnace adopts resistance wire heating, combined with polycrystalline fiber furnace chamber, which has excellent temperature rise and thermal insulation performance. The slide rails are tightly matched, slide smoothly, and easy to operate. At the same time, it adopts full-color LCD touch screen operation, which is simple and intuitive, easy to use, can simplify the experimental operation and save the test time
slide Tube Furnace technical Parameters：
Model | CY-OTF-1200X-80-IIII-4CV-SL CVD furnace |
Tube furnace | Display LED Max. Temperature 1200℃ Continuous Working Temp. ≤1100℃ Heating Rate 0~20℃/min Temperature Zone three Accuracy ±1℃ Sapphire Tube dia：80mm Length：2000mm Temperature Control PID automatic control via SCR power control Heating curves 30 steps programmable Heating zone:400-400-400mm Power 220V, 50 Hz, single phase |
Furnace structure | High purity Al2O3 insulation chamber guarantees excellent temperature uniformity. Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation. Sliding flange assembly are made of stainless steel. |
Heating element | Resistance wire |
Thermal couple | K Type(two pieces,one for temperature oven, and the other must be in the hold in order to measure the real temperature of the sample being prepared) |
Working voltage | AC110-480V 50/60 Hz |
Temperature control | PID automatic control via SCR power control |
Chamber material | Alumina Fiber |
Flange connection | Stainless steel water-cooled flange |
Sliding Rail | 2000mm long sliding rail is installed with one end flange to make loading & unload sample easy. |
Mass Flow meters | Working Temp.: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1.5% FS Liner: ±（0.5-1.5）%F.S. Duplicate accuracy: ±0.2%F.S. Controlling Range: Controller 1: 0~100 SCCM Controller 2: 1~200 SCCM Controller 3: 1~500SCCM Controller 4: 1~500SCCM |
