This product is a rapid annealing furnace, heated by the halogen lamp, and can be used for rapid thermal annealing, rapid thermal oxidation, rapid thermal nitriding, silicidation, diffusion, compound semiconductor annealing, annealing after ion implantation, electrode alloying, crystallization and Densification, alloy melting point analysis, film deposition, etc.
This product is a rapid annealing furnace, heated by the halogen lamp, and can be used for rapid thermal annealing, rapid thermal oxidation, rapid thermal nitriding, silicidation, diffusion, compound semiconductor annealing, annealing after ion implantation, electrode alloying, crystallization and Densification, alloy melting point analysis, film deposition, etc.
The equipment is mainly composed of quartz vacuum chamber, vacuum pump unit, water cooling unit and control system. The control system adopts intelligent temperature control meter control and touch screen operation. Its digital parameter interface and automatic operation mode provide users with an excellent research and development platform. The furnace chamber uses a left-right sliding way, and the distance from the sample is flexibly adjustable.
The equipment is equipped with a dual stage rotary vane pump, which has the advantages of small size, low noise, and no oil pollution.
Technical parameters:
Model
CY-O1000-100I-T-RTP
Furnace tube specifications
Inner diameter 100mm, heating temperature zone 400mm, total length 550mm
Material: high purity quartz
Heating rate
0-200℃/s
Cooling rate
Above 200℃≤25min
Heating element
Halogen lamp
Vacuum interface
KF16
Intake port
Pagoda head, with 10mm outer diameter air hose
Flange specification
φ100 stainless steel vacuum method water cooling flange
Water cooling interface: φ10mm quick plug connector
Vacuum system
Dual stage rotary vane pump, pumping speed 1.1L/s
Ultimate vacuum: 10-1Pa
Temperature control system
Intelligent temperature control meter temperature control
With over-temperature protection
Temperature measurement: K-type thermocouple
Water chiller
Water tank capacity 9L, Max. lift head 10m
Intake port
φ10 Pagoda Head
Air release valve
Manual air release valve
Power requirements
220V 50Hz, 24kW
Dimensions
1200mm x 500mm x 480mm
Rapid annealing furnace video:
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