12 inch Spin Coater with stainless steel Chamber

12 inch Spin Coater with stainless steel Chamber

spin coater is with vacuum chuck designed for easy and quick coating via sol-gel for wafers up to 12" diameter

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CY-SPC12-C spin coater is with vacuum chuck designed for easy and quick coating via sol-gel for wafers up to 12" diameter. This spin coater adopts advanced precision motor, the maximum speed can reach 5000rpm, which effectively guarantees the uniformity of film formation. Besides, the instrument adopts touch screen control, can preset the coating curve, which greatly simplifies the process.

Spin coater application:

Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films, mainly used in photoresist spin coating, biological medium production, sol-gel method for polymer film production, etc.

Technical parameters：

Input power supply	AC220V, 50Hz
Chamber material	stainless steel (transparent acrylic)
Substrate size	Diameter≤12 inches (~300mm)
Spin speed	0-5000rpm
Acceleration	100-5000rpm/s
Speed resolution	1rpm
Single step time	3000s
Operation method	7 inches HD LCD touch screen
Dispensing method	Manual dispensing
Coating curve	Each curve has 5 segments, can store 5 curves in total
Vacuum chuck	Yes, includes
Vacuum pump	Oil-less pump
Pumping speed	50 L/min
Total weight	~40kg