| Input & Output Power | Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase Total Power required: 8KW ( including pump)other 3 phase voltage is available upon requestOutput: 5VAC max. and 300A Max. |
Vacuum Chamber
| Stainless steel chamber: 280mm ID. x 375 mm Height,(~23Liter)Sand-blasting electrolytic polishing surface 100 mm observation window in front of chamberHinged type door for easy sample loadingManually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one4 KF40 ports built in chamber for connecting to necessary device |
Vacuum Pump
| High-speed turbo vacuum pump is included and connected to the vacuum chamber.Vacuum speed:600L/SVacuum level:5.0x10-6Torr(after 40 minutes pumping )Limit vacuum:5.0x10-7Torr ( after baking at 100 -150°C)Leaking rate:5.0x10-7 Pa.Vacuum port:150 mm diameter |
| Evaporation Source & Sample Holder | Four tungsten heating boats are included supported by water cold electrodesTungsten heating boat has dimension 70mm L x 12 mm W x 3 mm H.Each top of boat has a manual operation shutter Built in manual shutter allows evaporation source can be used without contamination100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracyThe distance between evaporation source and sample holder is 150-300 mm adjustable |
| Thickness control (optional) | One High-Resolution Film Thickness Monitor and Controller is optionalThe accuracy of thickness control is 1.0A |
| Control Unit | Vacuum, thickness and power control are integrated into one control boxControl Unit is separated from vacuum chamber for easy movingYou may place the control unit on the top of vacuum station |
| Overall Dimensions | L600mm× W860mm× H1500mm |
| Net Weight | 600 kg |
| Facility Requirement for Installation | Space:250 SF with height > 6 feetPower:208 - 240V AC, single phase with Max 10KW ( 50A breaker)Water:>15L/minute flowing water required for electrode cooling. |
| Warranty & Certificate | Two years limited warranty with lifetime support
CE certified |
