The multi-function coating machine can perform vacuum carbon evaporation, vacuum thermal evaporation and plasma sputtering. It can also perform a variety of ion treatments under the protection of high-purity argon.
The multi-function coating machine can perform vacuum carbon evaporation, vacuum thermal evaporation and plasma sputtering. It can also perform a variety of ion treatments under the protection of high-purity argon. By changing the function kit, the device can quickly switch between multiple functions, which is very suitable for making SEM samples in the laboratory. This instrument is equipped with a mechanical pump and a molecular pump, which can meet a variety of vacuum requirements, especially high vacuum, and can effectively improve the quality of coating.
Equipped with manual fine-tuning valve, the interface is 1/4 inch ferrule connector
Power requirements
AC 220V 50Hz
Plasma sputtering set
Sputtering voltage
1600V
Maximum current
50mA
Target size
2 inches
Working vacuum
10Pa~20Pa
Working atmosphere
Requires high purity argon
Thermal evaporation coating set
Number of evaporation sources
2
Max. current
100A
Working vacuum
10^-3Pa
Working atmosphere
Do not need any gas.
Sample stage
Diameter φ60mm, rotatable
Carbon evaporation set
Evaporation method
Carbon rod evaporation
Max. current
160A
Working vacuum
10^-3Pa
Working atmosphere
Do not need any gas.
Vacuum system
Product model
CY-GZK103-A
Molecular pump
Turbomolecular pump
Backing pump
Two-stage otary vane pump
Pumping rate
Molecular pump: 600L/S
Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa
Rotary vane pump: 1.1L/S
Ultimate vacuum
5×10E-4Pa
Pumping port
KF40
Exhaust interface
KF16
Vacuum measurement
Compound vacuum gauge
multi-function coating machine video:
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