Desktop dual-source thermal evaporation coater

Product Name

Desktop dual-source thermal evaporation   coater

Product Model

CY-EVP170S-2S-A

Installation   Condition

1、Working   environment temperature: 25℃±15℃，humidity:   55%Rh±10%Rh；

2、Equipment   power supply：AC220V，50Hz， must be well grounded；

3、Rated power：2500w；

4、Equipment for   gas ：The equipment   chamber should be filled with argon gas for cleaning. The customer should   prepare argon gas with purity ≥99.99%.

5、Table size   requirements: 600mm×600mm×700mm，bearing capacity ≥ 70kg；

6、The position   should be well ventilated and cooled.

Technical   Indicators

1、  Number of   evaporation sources: 2, each evaporation source is equipped with baffle;

2、 Evaporation source   voltage: 10V

3、 The evaporation current   is continuously adjustable from 0 to 100A

4、 With two tungsten boat,   two tungsten basket;

5、  Stainless steel   rotating upper sample table, diameter of 60mm;

6、  The distance   between the sample platform and the evaporation source is adjustable from 60   to 100mm;

7、 The vacuum cavity is a   stainless steel cavity with an outside diameter of 170mm ,  an inside diameter 160mm and a height of   210mm;

8、 The air pumping interface   of the vacuum chamber is KF40;

9、 Air intake interface is   1/4 inch double ferrule joint ,stainless steel fine-tuning   valve is provided by default to adjust the air intake;

10、 Touch screen is 7inch   color touch screen;

11、 Adjustable sputtering current   ，sputtering   safety current value and safety vacuum value can be set；

12、  safety protection:   over current, vacuum is too low automatically cut off the sputtering current;

13、 Ultimate vacuum：1Pa(matching double stage   rotary vane pump)；

14、 Vacuum measurement is Parana   vacuum gauge ，the   range is：1～105Pa

Notice

1、In order to give full   play to the vacuum performance of the cavity, it is recommended to use it   with molecular pump group

Optional accessory

Film  

thickness Monitor

1、Film thickness resolution：0.0136Å（aluminum）

2、Accuracy of film   thickness ：±0.5%，it depends on process   conditions, especially sensor position, material stress, temperature and   density  

3、Measuring speed：100ms to 1s per times ，measurement range can be   set ：500000Å（aluminum）

4、Standard sensor crystal：6MHz

5、Suitable for wafer   frequency：6MHz  

suitable for wafer size：Φ14mm

mounting flange：CF35

Another   Accessory

1、tungsten boat, tungsten   basket;

2、Organic evaporation   source (including quartz boat and tungsten wire heating source)

3、CY-CZK103 series high   performance molecular pump set(including composite vacuum gauge, measuring   range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4 bipolar rotary vane   vacuum pump

4、KF40 Vacuum bellows; The   length can be 0.5m, 1m or 1.5m. KF40 clamp bracket;

5、Film thickness meter   crystal oscillator;