Desktop thermal evaporation coater with quartz cavity is a small desktop thermal evaporating coater ,it can provide a maximum of 100A coating current，the maximum evaporating temperature up to 1800℃，and can meet the evaporation of a variety of common metal and part of non-metal
Desktop thermal evaporation coater with quartz cavity is a small desktop thermal evaporating coater ,it can provide a maximum of 100A coating current，the maximum evaporating temperature up to 1800℃，and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of high purity quartz , which is easy to observe the coating process and easy to clean ;When coordinating with the molecular pump group it can achieve the limit vacuum of 5x10-4 Pa , which can effectively ensure the purity and binding force of the evaporated film .
Desktop thermal evaporation coater with quartz cavity
1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh；
2、Equipment power supply：AC220V，50Hz， must be well grounded；
4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.
5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 50kg；
6、The position should be well ventilated and cooled.
1、 evaporation source voltage: 10V
2、 The evaporation current is continuously adjustable from 0 to 100A
3、 With a tungsten boat, a tungsten basket;
4、 Stainless steel rotating upper sample table, diameter of 60mm;
5、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm;
6、 The vacuum cavity is a quartz cavity with a diameter of 180mm and a height of 200mm;；
7、 The air pumping interface of the vacuum chamber is KF25
8、 Air intake interface is 1/4 inch double ferrule joint
9、 Touch screen is 7inch color touch screen
10、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set；
11、 safety protection: over current, vacuum is too low automatically cut off the sputtering current
12、 Ultimate vacuum：5E-4Pa (matching molecular pump)；
13、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa
1. For the materials that are sensitive to oxygen, it is recommended to add molecular pump group.
1、Film thickness resolution：0.0136Å（aluminum）
2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density
3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum）
4、Standard sensor crystal：6MHz
5、Suitable for wafer frequency：6MHz
suitable for wafer size：Φ14mm
1、tungsten boat, tungsten basket;
2、Organic evaporation source (including quartz boat and tungsten wire heating source)
3、CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa);
CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa)
VRD-4 bipolar rotary vane vacuum pump
4、KF25 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF25 clamp bracket;
5、Film thickness meter crystal oscillator;
On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.