Desktop thermal evaporation coater with stainless steel cavity is a small desktop thermal evaporation coater especially designed for high vacuum , it can meet the evaporation of a variety of common metal of non-metal
Desktop thermal evaporation coater with stainless steel cavity is a small desktop thermal evaporation coater especially designed for high vacuum , it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials. The vacuum chamber is opened by lifting the cover to facilitate lofting. The chamber is equipped with an adaptive observation window with a baffle for observing the coating process. The baffle can effectively prevent the observation window from being polluted by the film material.
Desktop thermal evaporation coater with stainless steel cavity
1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh；
2、Equipment power supply：AC220V，50Hz， must be well grounded；
4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.
· 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 50kg
6、The position should be well ventilated and cooled.
1、 Evaporation source voltage: 10V
2、 The evaporation current is continuously adjustable from 0 to 100A
3、 With a tungsten boat, a tungsten basket;
4、 Stainless steel sample table, diameter of 60mm;
5、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm;
6、 The vacuum cavity is a stainless steel cavity with an outside diameter of 170mm , an inside diameter 160mm and a height of 210mm;
7、 It is equipped with quartz observation window with baffle, the size is φ60mm
8、 The air pumping interface of the vacuum chamber is KF40;
9、 Air intake interface is 1/4 inch double ferrule joint;
10、 Touch screen is 7inch color touch screen;
11、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set；
12、 Safety protection: over current, vacuum is too low automatically cut off the sputtering current;
13、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)；
14、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa
1、In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group .
1、Film thickness resolution：0.0136Å（aluminum）
2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density
3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum）
4、Standard sensor crystal：6MHz
5、Suitable for wafer frequency：6MHz
suitable for wafer size：Φ14mm
1、tungsten boat, tungsten basket;
2、Organic evaporation source (including quartz boat and tungsten wire heating source)
3、CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa);
CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa)
VRD-4 bipolar rotary vane vacuum pump
4、KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket;
5、Film thickness meter crystal oscillator;
On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.