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Desktop thermal evaporation coater with stainless steel cavityDesktop thermal evaporation coater with stainless steel cavityDesktop thermal evaporation coater with stainless steel cavityDesktop thermal evaporation coater with stainless steel cavity

Desktop thermal evaporation coater with stainless steel cavity

    Desktop thermal evaporation coater with stainless steel cavity is a small desktop thermal evaporation coater especially designed for high vacuum , it can meet the evaporation of a variety of common metal  of non-metal

Desktop thermal evaporation coater with stainless steel cavity is a small desktop thermal evaporation coater especially designed for high vacuum , it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials. The vacuum chamber is opened by lifting the cover to facilitate lofting. The chamber is equipped with an adaptive observation window with a baffle for observing the coating process. The baffle can effectively prevent the observation window from being polluted by the film material.

thermal evaporation coater

thermal evaporation coater technical parameter:

Product Name

Desktop thermal evaporation   coater with stainless steel cavity

Product Model

CY-EVP170S-1S-A

Installation   Condition

1Working environment   temperature: 25±15humidity: 55%Rh±10%Rh

2Equipment power supplyAC220V50Hz must be well grounded

3Rated power1200w

4Equipment for gas The equipment chamber   should be filled with argon gas for cleaning. The customer should prepare   argon gas with purity ≥99.99%.

·             5Table   size requirements: 600mm×600mm×700mmbearing   capacity ≥ 50kg

·          

6The position should be   well ventilated and cooled.

Technical   Indicators

1、 Evaporation source voltage:   10V

2、 The evaporation current   is continuously adjustable from 0 to 100A

3、 With a tungsten boat, a   tungsten basket;

4、 Stainless steel sample   table, diameter of 60mm;

5、  The distance   between the sample platform and the evaporation source is adjustable from 60   to 100mm;

6、 The vacuum cavity is a   stainless steel cavity with an outside diameter of 170mm ,  an inside diameter 160mm and a height of   210mm;

7、 It is equipped with   quartz observation window with baffle, the size is φ60mm

8、 The air pumping interface   of the vacuum chamber is KF40;

9、 Air intake interface is   1/4 inch double ferrule joint;

10、 Touch screen is 7inch   color touch screen;

11、 Adjustable sputtering   current sputtering   safety current value and safety vacuum value can be set

12、  Safety protection:   over current, vacuum is too low automatically cut off the sputtering current;

13、 Ultimate vacuum1Pa(matching double stage   rotary vane pump)

14、 Vacuum measurement is   Parana vacuum gauge the   range is1105Pa

Notice

1In order to give full   play to the vacuum performance of the cavity, it is recommended to use it   with molecular pump group . 

Optional accessory

Film  

thickness Monitor

1Film thickness resolution0.0136Åaluminum

2Accuracy of film   thickness ±0.5%it depends on process   conditions, especially sensor position, material stress, temperature and   density  

3Measuring speed100ms to 1s per times measurement range can be   set 500000Åaluminum

4Standard sensor crystal6MHz

5Suitable for wafer   frequency6MHz  

suitable for wafer sizeΦ14mm

mounting   flangeCF35

Another   Accessory

1tungsten boat, tungsten   basket;

2Organic evaporation   source (including quartz boat and tungsten wire heating source)

3CY-CZK103 series high   performance molecular pump set(including composite vacuum gauge, measuring   range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4 bipolar rotary vane   vacuum pump

4KF40 Vacuum bellows; The   length can be 0.5m, 1m or 1.5m. KF40 clamp bracket;

5Film thickness meter   crystal oscillator;

 


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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