small thermal evaporation coater for glove box type

Product   Name

small   thermal evaporation coater for glove box type

Product   Model

CY-EVP180G-1S-G（G means glove box）

Installation Condition

1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh；

2、Equipment power supply：AC220V，50Hz， must be well grounded；

3、Rated power：1200w；

4、Equipment for gas ：The equipment chamber should be filled with argon   gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.

5、Table size requirements: 580mm×250mm×330mm，bearing capacity ≥ 30kg；

6、The position should be well ventilated and cooled.

Technical Indicators

1、 evaporation source   voltage: 10V

2、 The evaporation current   is continuously adjustable from 0 to 100A

3、 With a tungsten boat, a   tungsten basket;

4、  stainless steel   sample table, diameter of 60mm;

5、  The distance   between the sample platform and the evaporation source is adjustable from 20   to 55mm;

6、 The vacuum cavity is a   quartz cavity with a diameter of 180mm and a height of 100mm;；

7、 The air pumping interface   of the vacuum chamber is KF16

8、 Air intake interface is   1/4 inch double ferrule joint

9、 Touch screen is 7inch   color touch screen

10、 Adjustable sputtering   current ，sputtering   safety current value and safety vacuum value can be set；

11、  safety protection:   over current, vacuum is too low automatically cut off the sputtering current

12、 Ultimate vacuum：5E-4Pa (matching   molecular pump)；

13、 Vacuum measurement is   Parana vacuum gauge ，the   range is1～10⁵Pa

Notice

1. For the materials that   are sensitive to oxygen, it is recommended to add molecular pump group. 

2、In order to achieve a   high oxygen free environment, the vacuum chamber should be cleaned at least 3   times with high purity inert gas.

Optional   accessory

Film

thickness   Monitor

1、Film thickness   resolution：0.0136Å（aluminum）

2、Accuracy of   film thickness ：±0.5%，it depends on   process conditions, especially sensor position, material stress, temperature   and density  

3、Measuring   speed：100ms to 1s   per times ，measurement   range can be set ：500000Å（aluminum）

4、Standard   sensor crystal：6MHz

5、Suitable for   wafer frequency：6MHz

suitable for wafer size：Φ14mm

mounting flange：CF35

Another Accessory

1、tungsten boat, tungsten   basket;

2、Organic evaporation   source (including quartz boat and tungsten wire heating source)

3、CY-CZK103 series high   performance molecular pump set(including composite vacuum gauge, measuring   range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4 bipolar rotary vane   vacuum pump

4、KF40   Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket;

5、Film   thickness meter crystal oscillator;