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small thermal evaporation coater for glove box type

    small thermal evaporation coater for glove box type is a small desktop evaporation coater specially designed for glove box type ,it can can meet the evaporation of a variety of common metal and part of non-metal

small thermal evaporation coater for glove box type is a small desktop evaporation coater specially designed for glove box type ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of high purity quartz , which is easy to observe the coating process and easy to clean ;When coordinating with the molecular pump group it can achieve the limit vacuum of 5x10-4 Pa ,  which can effectively ensure the purity and binding force of the evaporated film . The small size of the instrument, through miniaturization design, can effectively save laboratory space, specially designed for use in glove box; Its simple operation, strong adaptability to different materials , very suitable for laboratory purchase.

small thermal evaporation coater

thermal evaporation coater technical parameter:

Product   Name

small   thermal evaporation coater for glove box type

Product   Model

CY-EVP180G-1S-GG means glove box

Installation Condition

1Working environment temperature: 25±15℃,humidity: 55%Rh±10%Rh

2Equipment power supplyAC220V50Hz must be well grounded

3Rated power1200w

4Equipment for gas The equipment chamber should be filled with argon   gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.

5Table size requirements: 580mm×250mm×330mmbearing capacity ≥ 30kg

6The position should be well ventilated and cooled.

Technical Indicators

1、 evaporation source   voltage: 10V

2、 The evaporation current   is continuously adjustable from 0 to 100A

3、 With a tungsten boat, a   tungsten basket;

4、  stainless steel   sample table, diameter of 60mm;

5、  The distance   between the sample platform and the evaporation source is adjustable from 20   to 55mm;

6、 The vacuum cavity is a   quartz cavity with a diameter of 180mm and a height of 100mm;

7、 The air pumping interface   of the vacuum chamber is KF16

8、 Air intake interface is   1/4 inch double ferrule joint

9、 Touch screen is 7inch   color touch screen

10、 Adjustable sputtering   current sputtering   safety current value and safety vacuum value can be set

11、  safety protection:   over current, vacuum is too low automatically cut off the sputtering current

12、 Ultimate vacuum5E-4Pa (matching   molecular pump)

13、 Vacuum measurement is   Parana vacuum gauge the   range is1105Pa

Notice

1. For the materials that   are sensitive to oxygen, it is recommended to add molecular pump group. 

2In order to achieve a   high oxygen free environment, the vacuum chamber should be cleaned at least 3   times with high purity inert gas.

Optional   accessory

Film

thickness   Monitor

1Film thickness   resolution0.0136Åaluminum

2Accuracy of   film thickness ±0.5%it depends on   process conditions, especially sensor position, material stress, temperature   and density  

3Measuring   speed100ms to 1s   per times measurement   range can be set 500000Åaluminum

4Standard   sensor crystal6MHz

5Suitable for   wafer frequency6MHz

suitable for wafer sizeΦ14mm

mounting flangeCF35

Another Accessory

1tungsten boat, tungsten   basket;

2Organic evaporation   source (including quartz boat and tungsten wire heating source)

3CY-CZK103 series high   performance molecular pump set(including composite vacuum gauge, measuring   range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4 bipolar rotary vane   vacuum pump

4、KF40   Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket;

5、Film   thickness meter crystal oscillator;

 


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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