The plasma sputtering and evaporating two-in-one film coater is equipped with DC sputtering target and thermal evaporation assembly, which can be used not only for plasma sputtering, but also obtain carbon or other metal simple films by evaporation. In order to improve the coating quality, this two-in-one film coater adopts stainless steel vacuum chamber with high vacuum design of precision molecular pump, high vacuum degree can effectively improve the purity and uniformity of coating, which is conducive to get better experimental results. The sample stage has the function of rotation and heating, which can improve the film adhesion and film uniformity. The instrument is small in size, saves space, and can be placed on the test bench. It is very suitable for universities and research institutions.
Small high vacuum two-in-one film coater applications:
Scanning electron microscope sample surface gold spraying, steaming gold, carbon spraying and other operations, as well as the preparation of non-conductor material test electrodes.
Small high vacuum two-in-one film coater technical parameters:
Small high vacuum two-in-one film coater |
Sample stage | Size | φ138mm | Temperature accuracy | ±1℃ |
Heating temperature | Max 500℃ | Rotary speed | 1-20rpm adjustable |
DC sputtering head | Quantity | 2” ×1 |
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Evaporation system | Evaporation source | Tungsten wire basket | Max temperature | 1700℃ |
Thermocouple | S type thermocouple |
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Vacuum chamber | Chamber size | φ170mm × 200mm | Observation Window | Quartz observation window φ70 |
Chamber material | Stainless steel | Opening way | Top cover open |
Vacuum system | Model | CY-GZK103-A | Pumping interface | KF40 |
Molecular pump | CY-600 | Exhaust interface | KF16 |
Backing pump | Rotary vane pump | Vacuum measurement | Compound vacuum gauge |
Ultimate vacuum | 1.0E-5Pa |
Pumping rate | Molecular pump: 600L/S rotary Rotary vane pump: 1.1L/S comprehensive pumping performance: 20 minutes vacuum up to: 1.0E-3pa |
Sputter power configuration | Quantity | DC power supply×1 | Max output power | 150w |
Other parameters | Supply voltage | AC220V,50Hz | Dimensions | 600mm×300mm×470mm |
Total power | 1.5kw | Total weight | 40kg |
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