Structure & Features
| 6"OD Quartz chamber for easy cleaning and sample loading
2" Dia rotable sample holder for uniform film coating
Two heaters are included, e.g. Alumina and Tungsten heaters for both low or high temperature coating upto 1700ºC
Precision temperature control with 30 segment programmable and +/- 1C accuracy
High vacuum can be achieved upto 10E-5 torr via optional turbo pump
Gas flow port and valve are built in for CVD possibility |
| Input Power | Input Voltage: AC 208 - 220V 50/60Hz , single phase, 50/60Hz
500 W with max. 30A current
Power cable included without plug |
Temperature Control
&
Heaters
| Tungsten Heater with a thermal couple is built in bottom of alumina crucible for temperature controlled (PIC.
Standard S type Thermal Couple: -- heating from 200ºC - 1500ºC
Optional B type Thermal Couple - heating from 1200ºC - 1700ºC
One digital temperature controller with 30 segment programmable and +/- 1ºC accuracy
Temperature also can be switched to manual mode without thermalcouple and thermal installation for faster coating upto 2000ºC , such as Carbon coating
Two Tungsten coil heaters are included.Spare heater is available upon request at extra cost. |
| Specimen Holder | One 50 mm Dia.rotable sample stage is installed on top of coater
Rotating speed 5 rpm
The distance between sample holder to evaporation source is adjustable from 60mm to 100 mm |
| Vacuum | KF40 vacuum port is installed to connect a vacuum pump
One Anti-Corrosive Capacitance Diaphragm Gauge is included to measure vacuum upto 10E-6 torr |
| Gas Inlet | 1/4 NPS gas inlet port is built in for inert gas cleaning or forming gas processing
One needle valve is built in to control gas flowing rate |
| Optional | Vacuum pump is required for coating ( not included ).
Double Stage Rotary Vane Vacuum Pump with Vapor trap eliminates the oil mist, which can reach vacuum upto 10-2 torr for evaporating noble metallic materials , such as Gold, silver
Compact Turbo-molecular Vacuum Pump System (up to 1E-7 mbar) is able to provide vacuum level up to 1.05 x 10^-5 for evaporating oxygen sensitive materials, such as Al. Mg, Li etc |
| Compliance and Warranty | CE certified |
