Roll to roll PECVD graphene preparation equipment

Roll to roll PECVD graphene preparation equipment

Roll to roll PEVCD is a roll-to-roll tubular furnace system for graphene preparation. The equipment consists of coil to coil copper foil rewinding and placing sealing device, 1200°C tube furnace with three temperature zones and vacuum unit. It can be used for large-scale growth of high quality graphene and other two-dimensional materials

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Roll to roll PECVD graphene preparation equipment for continuous production of flexible transparent electrodes，Roll to roll PEVCD is a roll-to-roll tubular furnace system for graphene preparation. The equipment consists of coil to coil copper foil rewinding and placing sealing device, 1200°C tube furnace with three temperature zones and vacuum unit. It can be used for large-scale growth of high quality graphene and other two-dimensional materials

Roll to roll PEVCD applied range:

It can be used in screens of computer and cellphone, ultra-light flexible solar cells, new luminescent devices and other film electronics fields.

Roll to roll PEVCD technical parameters:

Performance specifications and basic configurations
Product name	Roll to roll PEVCD
Product model	CY-OTF-1200X-III-PE300-RR
1000W Plasma source	● Output power：50-1000W Maximum adjustable ±1% ● RF rate： 13.56MHz，stability±0.005% ● dB：≤55DB ● Cooling mode ：forced air cooling ● Input power：1KW AC 220V
Three proton flow meter control system	● Voltage：AC220V/50Hz ● Power：23W ● PLC touch screen control ● Size of mixing tank：φ80*120mm ●Operating temperature：5~45℃ ● Maximum pressure: 3x106 Pa ● Precision : ±1.5% FS ● Linear: ±（0.5-1.5）%F.S. ● Repeated accuracy: ±0.2%F.S. ● Range of flow: ● The first path : 1~50 SCCM （Methane calibration） ● The second path: 1~200 SCCM （Hydrogen calibration） ● The third path: 1~200 SCCM （Argon calibration） Other options are available for gas type calibration according to customer requirements
Vacuum measure unit	●Model：PCG-800 ● Indication range：3.8E-5 to 1125torr Precision： ● 5×10-4 … 1×10-3 mbar (N2) % of reading ±50 ● 1×10-3 … 100 mbar (N2) % of reading ±15 ● 100 … 950 mbar % of reading ±5 ● 950 … 1050 mbar % of reading ±2.5
Low vacuum unit	● It is composed of double-rotating mechanical pump, double-layer vertical oil mist filter (PE material), resistance vacuum gauge and connecting pipe joint ● Suction rate of vacuum pump≥4.4L/s ● Limit vacuum degree 10^-1Pa ●Vacuum gauge measuring range 10^-1Pa-10⁵ Pa
Reel-to-reel sealing devices for copper foil	· ● Coil to coil winding and unwinding mechanism is used to move copper foil in and out of the material, and the moving speed of copper foil is adjustable from 1-400mm/min. ● Configure a roll of test copper foil ● The winding and unwinding mechanism is placed in the vacuum chamber at both ends of the tube furnace to ensure that the copper foil can move under sealed growth conditions and achieve large-scale preparation ● A cooling device is set between the winding mechanism and the tubular furnace for rapid cooling of copper foil.
Product size	About 24008001250mm
Product weight	About 720kg
Quality certificate	CE certification is optional for electrical components
Warranty period	Special note: 1. Consumables such as heating element, quartz tube, sample crucible, etc. are not included. 2. Damage caused by corrosive and acidic gases is not covered by the warranty.