Single heating zone tube furnace | Product model | CY-O1200-100IT |
Furnace tube material | High purity quartz |
Tube diameter | 100mm |
Furnace tube length | 1500mm |
Furnace chamber length | 440mm |
Heating zone length | 400mm |
Constant temperature zone head | 200mm |
Operating temperature | 0～1100℃ |
Temperature control accuracy | ±1℃ |
Temperature control mode | 30 or 50 segment program temperature control |
Display mode | HD full color LCD touch screen |
Sealing method | 304 stainless steel vacuum flange |
Power supply | AC: 220V 50/60Hz |
RF output system | Power range | 0~500W adjustable |
working frequency | 13.56MHz+0.005% |
Working mode | Continuous output |
Matched impedance mode | It can be matched, and the glow is evenly distributed throughout the furnace tube |
Power stability | ≤2W |
Normal working reflected power | ≤3W |
Amplified reflected power | ≤70W |
Harmonic component | ≤-50dBc |
Overall efficiency | ≥70% |
Power factor | ≥90% |
Supply voltage/frequency | Single-phase AC (187V~153V) frequency 50/60Hz |
Control mode | Internal control/PLC analog quantity/RS232/485 communication |
Power protection settings | DC over current protection, power amplifier over temperature protection, reflected power protection |
Cooling method | Forced air cooling |
Glow zone | Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube |
Gas delivery system | Flowmeter | Four-channel mass flowmeter |
Flow range | MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar. |
Measurement accuracy | ±1.5%F.S |
Repeatability | ±0.2%FS |
Linear accuracy | ±1%F.S. |
Response time | ≤4s |
Work pressure | -0.15Mpa~0.15Mpa |
Flow control | LCD touch screen control, digital display, each channel gas contains needle valve for individually control. |
Intake interface | It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe |
Outlet interface | It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe |
Connection method | Double ferrule connector |
Operating temperature | 5~45℃ |
Gas premix | Equipped with gas premixing device |
Exhaust system | Product model | CY-GZK103-A |
Molecular pump | Turbomolecular pump |
Backing pump | Two-stage rotary vane pump |
Pumping rate | Molecular pump: 600L/S | Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa |
Rotary vane pump: 1.1L/S |
Ultimate vacuum | 5×10E-4Pa |
Pumping port | KF40 |
Exhaust interface | KF16 |
Vacuum measurement | Compound vacuum gauge |
Rotating and tilting device | Speed range | 0-20rpm |
Tilt angle | 0-15° |
Material feeding and receiving system | Automatic feeding, automatic collection after tilting |
