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1200℃ two heating zone high vacuum CVD system with 3-channel mass flow meter CY-O1200-50IIT-3Z-HV

1200℃ two heating zone high vacuum CVD system with 3-channel mass flow meter CY-O1200-50IIT-3Z-HV

    1200℃ two heating zone high vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

1200℃ two heating zone high vacuum CVD system consists of a two-heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set. The two heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form two temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections program of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

The system is also equipped with a precision molecular pump set, which can achieve a vacuum of 10E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ two heating zone high vacuum CVD system technical parameters:

Vacuum tube furnace

Model

CY-O1200-50IIT

Tube material

High purity quartz

Tube diameter

50mm

Tube length

1000mm

Furnace chamber length

440mm

Heating zone length

200mm+200mm

Operating temperature

0~1100℃

Temperature control   accuracy

±1℃

Temperature control   mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" cutting sleeve joint, KF16/25/40 joint

Vacuum

4.4×10E-3Pa

Power supply

AC:220V 50/60Hz

Gas supply system

Model

CY-3Z

Gas channel

3-channel

Measuring unit

Gas mass flow meter

Measuring range

A channel: 0100SCCM H2 gas

Remarks: If you need   other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.

B channel: 0300SCCM N2 gas

C channel: 0500SCCM Ar gas

measurement accuracy

±1.0%F.S

Pipe pressure   resistance

3MPa

Working pressure   difference

50300KPa

Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" cutting sleeve joint for gas inlet and outlet

Exhaust system

Model

CY-GZK103-A

Molecular pump

FJ-150

Front pole pump

VRD-4

Pumping rate

Molecular pump: 150L/S

Comprehensive gas   pumping performance: 30 minutes vacuum can reach: 6×10E-5Pa

Rotary vane pump: 4L/S

Pumping interface

KF40

Exhaust interface

KF16

Vacuum measurement

Compound vacuum gauge: Pirani gauge + ionization gauge

Ultimate vacuum

8×10E-7Pa

Power supply

AC:220V 50/60Hz

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

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