The two furnace bodies can slide on the slide rails to achieve evaporation/sublimation of the raw materials and film deposition. To achieve the fastest heating, the furnace can be preheated to the set temperature and the furnace moved to the sample position. For the fastest cooling, the furnace can be moved to the other end after heating, which is the ideal furnace for low-cost rapid heat treatment.
At the same time, electric slide rails, mass flow meter (MFC) controlled gas supply system and plasma RF power supply can be selected to build the TCVD system.
The device can be used for graphene preparation, sulfide preparation, and the like.
Small double furnaces sliding tube furnace technical parameters:
Micro tube furnace | Model | CY-O1200-50SDM |
Tube material | High purity quartz |
Tube diameter | 50mm(optional 60mm, 80mm, 100mm) |
Tube length | 1400mm |
Furnace chamber length | 300mm |
Heating zone length | 200mm |
Operating temperature | 0～1100℃ |
Temperature control accuracy | ±1℃ |
Temperature control mode | 30 or 50 segment program temperature control |
Display mode | Highlight the digital tube digital display |
Sealing method | 304 stainless steel vacuum flange |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
Vacuum | 4.4E-3Pa |
Power supply | AC:220V 50/60Hz |
Gas supply system | Model | CY-3F |
Gas channel | 3-channel |
Measuring unit | Gas mass flow meter |
Measuring range | A channel: 0～100SCCM H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. |
B channel: 0～300SCCM N2 gas |
C channel: 0～500SCCM Ar gas |
measurement accuracy | ±1.0%F.S |
Pipe pressure resistance | 3MPa |
Working pressure difference | 50～300KPa |
Connecting pipe | 304 stainless steel |
Gas channel | 304 stainless steel needle valve |
Interface specification | 1/4" ferrule connector for gas inlet and outlet |
Exhaust system | Mechanical pump | Rotary vane pump |
Pumping rate | 1.1L/S |
Exhaust interface | KF16 |
Vacuum measurement | Resistance gauge |
Ultimate vacuum | 1.0E-1Pa |
Power supply | AC:220V 50/60Hz |
Pumping interface | KF16 |
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