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Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump CY-O1200-60IT-4Z10V

Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump CY-O1200-60IT-4Z10V

    CY-O1200-60IT-4Z10V is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation

Model No.

CY-O1200-60IT-4Z10V

Display

LCD Touch Panel

Limiting temperature

1200℃

Working temperature

≤1100℃

Heating rate

0-20℃/min

Heating Zone length

440mm, constant temperature zone:200mm

Quartz tube diameter

OD60*1000mm

Temperature accuracy

± 1℃

Heating element

Fe-Cr-Al alloy adopt by Mo

Thermal couple

K TYPE

Cooling method

Double layer structure with fan cooling

Temperature control

30 steps programmable PID control

Chamber material

Alumina fiber

Over-temperature alarm

Yes

Over-current alarm

Yes

Sealing flange

S.S vacuum flange

Vacuum pump

Mechanical rotary vacuum pump(optional)

Cooling method

Air cooling

Connection pipe

stainless steel bellows, manual flap valve

Gas Mixer

4 way gas mixer

Accuracy

±2%F.S.

Repeat accuracy

±0.2% FS

Linear precision

±1%F.S.

Working pressure:

-0.1MPa~0.15MPa

MFC1 Range

0~100SCCM

MFC2 Range

0~200SCCM

MFC3 Range

0~200SCCM

MFC4 Range

0~500SCCM

Working voltage

AC220V,50Hz

Contact Us
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  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Korea Distributor:
    NEO LFN Corp
    Email:info@neolfn.com
    Tel:+82-31-999-4944
    Contact:Haeseop Kim
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