Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump CY-O1200-60IT-4Z10V

Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump CY-O1200-60IT-4Z10V

CY-O1200-60IT-4Z10V is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation

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Model No.	CY-O1200-60IT-4Z10V
Display	LCD Touch Panel
Limiting temperature	1200℃
Working temperature	≤1100℃
Heating rate	0-20℃/min
Heating Zone length	440mm, constant temperature zone:200mm
Quartz tube diameter	OD60*1000mm
Temperature accuracy	± 1℃
Heating element	Fe-Cr-Al alloy adopt by Mo
Thermal couple	K TYPE
Cooling method	Double layer structure with fan cooling
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Over-temperature alarm	Yes
Over-current alarm	Yes
Sealing flange	S.S vacuum flange
Vacuum pump	Mechanical rotary vacuum pump(optional)
Cooling method	Air cooling
Connection pipe	stainless steel bellows, manual flap valve
Gas Mixer	4 way gas mixer
Accuracy	±2％F.S.
Repeat accuracy	±0.2% FS
Linear precision	±1％F.S.
Working pressure：	-0.1MPa~0.15MPa
MFC1 Range	0~100SCCM
MFC2 Range	0~200SCCM
MFC3 Range	0~200SCCM
MFC4 Range	0~500SCCM
Working voltage	AC220V,50Hz