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Compact CVD system with 1200°C tube furnace 3 gas way float flow controller-CY-O1200-50IC-3F Compact CVD system with 1200°C tube furnace 3 gas way float flow controller-CY-O1200-50IC-3F

Compact CVD system with 1200°C tube furnace 3 gas way float flow controller-CY-O1200-50IC-3F

    This compact cvd system is composed by a mini tube furnace, a rotary vacuum pump, a 3 gas way float flow controller and a digital vacuum gauge. This compact cvd system is widely used in laboratory thin film preparation, such as MoS2, graphene etc.

Furnaceparameters
FurnaceConstruction•Highpurityceramicfiberinsulation(energysaving30%andweight
lighterabout30%thanoldfurnace).
•Doublelayerssteelcasingwithfancooling,toensurethe
surfaceoffurnacebelow50°C.
•Perfectsealingstainlesssteelflangewithblock.
ChamberSizeΦ50*1000mm,Φ60*1000mm,Φ80*1000mm,Φ100*1000mm
orascustomized
Power0.8KW~10KW,baseontheheatingzonelength
VoltageAC220V50/60Hz
Max.Temperature1200°C(<2hour)
ContinuousWorkTemp.1150°C
Max.HeatingRate20°C/min
TemperatureController•PIDautomaticcontrolandauto-tunefunction.
•30programmablesegmentsforprecisecontrol.
•Over-heatedandbrokenThermalcouple.
•DigitalcontrolpanelLEDbuttonorLCDtouchscreen
TemperatureAccuracy+/-1°C
HeatingElementAludirome
ThermalCoupleKtype
VacuumPump·AC220V50Hz1/2HP375W
·2Liter/Sor120liter/m
·Oiltrap(inlet)andexhaustfilter(outlet)areinstalled.
·Max.vacuum:10-2torr
Float Flow Control3 gas way
16~160,25~250,60~600ml/min as customized
WarrantyOneyearlimitedwarranty(Consumablepartssuchasthermocouple,doorblockandheatingelements
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  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Korea Distributor:
    NEO LFN Corp
    Email:info@neolfn.com
    Tel:+82-31-999-4944
    Contact:Haeseop Kim
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