Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.
The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in vacuum. High-energy plasma can activate the sample surface, effectively enhance the reaction effect and increase the reaction rate. This auxiliary method is widely used in scientific experiments such as graphene preparation and particle coating.
This equipment is especially suitable for granular sample experiments. Through mechanical transmission, it can control the continuous rotation of the working tube 360° with adjustable rotation speed, so that the materials in the tube are continuously stirred and mixed, and fully contact with the gas and plasma, so that the reaction of the sample is more uniform and stable.
Technical parameters of rotary PECVD tube furnace:
RF power supply | Output Power | 150W |
Output accuracy | ±1% |
RF frequency | 13.56MHz |
RF stability | ±0.005% |
Cooling method | Air-cooling |
1200℃ Single heating zone tube furnace | Supply voltage | AC220V, 50Hz |
Maximum power | 2KW |
Heating zone | Single heating zone 200mm |
Working temperature | Maximum 1200℃, continuous operating temperature should be ≤1100 ℃ |
Temperature accuracy | ± 1 ℃ |
Temperature control method | AI-PID 30-stage process curve, can store multiple Three temperature zone independent control, with overheat and thermocouple failure protection |
Furnace tube material | High purity quartz |
Furnace tube size | Dia. 50x800mm |
Sealing method | Vacuum stainless steel flange, KF16 flange |
Adjustable speed | 0-20rpm |
Furnace tilt angle | 0-15° |
Vacuum pump | Rotary vane mechanical pump |
Ultimate vacuum | 1.0E-1Pa |
Feeding method | Vacuum funnel and screw feed |
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